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Bruce E. Duewer
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Publications (4)
Proceedings Article | 21 November 2001 Paper
Improving interconnect characteristics of thin film MEMS processes
Bruce Duewer, David Winick, Andrew Oberhofer, John Muth, Paul Franzon
Proceedings Volume 4592, (2001) https://doi.org/10.1117/12.448966
KEYWORDS: Metals, Resistance, Microelectromechanical systems, Sputter deposition, Capacitors, Gold, Thin films, Oxides, Reflectivity, Microopto electromechanical systems
Proceedings Article | 19 November 2001 Paper
Design of rotating MEMS tunable capacitors for use at rf and microwave frequencies
John Wilson, Rizwan Bashirullah, David Nackashi, David Winick, Bruce Duewer, Paul Franzon
Proceedings Volume 4593, (2001) https://doi.org/10.1117/12.448850
KEYWORDS: Metals, Capacitance, Microelectromechanical systems, Capacitors, Microwave radiation, Solids, Gold, Instrument modeling, Scattering, Oxides
Proceedings Article | 8 October 1999 Paper
Programmable MEMS capacitor arrays
Proceedings Volume 3893, (1999) https://doi.org/10.1117/12.368433
KEYWORDS: Switches, Microelectromechanical systems, Capacitors, Receivers, Phased arrays, Actuators, Switching, Capacitance, Computer programming, Control systems
Proceedings Article | 15 March 1998 Paper
MEMS-based diffractive optical-beam-steering technology
David Winick, Bruce Duewer, Som Chaudhury, John Wilson, John Tucker, Umut Eksi, Paul Franzon
Proceedings Volume 3276, (1998) https://doi.org/10.1117/12.302411
KEYWORDS: Microelectromechanical systems, Beam steering, Switching, Computer programming, Binary data, LIDAR, Analog electronics, Optical components, Wavefronts, Prototyping
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