Dr. Chanmin Su Profile

Dr. Chanmin Su

Director of Technology at Bruker Nano Inc

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Publications (4)

Proceedings Article | 18 April 2013 Paper

High-speed atomic force microscopy for patterned defect review

Jason Osborne, Shuiqing Hu, Haiming Wang, Yan Hu, Jian Shi, Sean Hand, Chanmin Su

Proceedings Volume 8681, 86813C (2013) https://doi.org/10.1117/12.2011665

KEYWORDS: Atomic force microscopy, Servomechanisms, Capillaries, Metrology, Feedback control, Semiconducting wafers, Image resolution, Electron beams, Control systems, Video

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Proceedings Article | 6 April 2012 Paper

High-speed atomic force microscopy and peak force tapping control

Shuiqing Hu, Lars Mininni, Yan Hu, Natalia Erina, Johannes Kindt, Chanmin Su

Proceedings Volume 8324, 83241O (2012) https://doi.org/10.1117/12.928545

KEYWORDS: Atomic force microscopy, Scanners, Semiconducting wafers, Modulation, Transmission electron microscopy, Image resolution, Metrology, Associative arrays, Extreme ultraviolet, Silicon

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ITRS Roadmap requires defect size measurement below 10 nanometers and challenging classifications for both blank and patterned wafers and masks. Atomic force microscope (AFM) is capable of providing metrology measurement in 3D at sub-nanometer accuracy but has long suffered from drawbacks in throughput and limitation of slow topography imaging without chemical information. This presentation focus on two disruptive technology developments, namely high speed AFM and quantitative nanomechanical mapping, which enables high throughput measurement with capability of identifying components through concurrent physical property imaging. The high speed AFM technology has allowed the imaging speed increase by 10-100 times without loss of the data quality. Such improvement enables the speed of defect review on a wafer to increase from a few defects per hour to nearly 100 defects an hour, approaching the requirements of ITRS Roadmap. Another technology development, Peak Force Tapping, substantially simplified the close loop system response, leading to self-optimization of most challenging samples groups to generate expert quality data. More importantly, AFM also simultaneously provides a series of mechanical property maps with a nanometer spatial resolution during defect review. These nanomechanical maps (including elastic modulus, hardness, and surface adhesion) provide complementary information for elemental analysis, differentiate defect materials by their physical properties, and assist defect classification beyond topographic measurements. This paper will explain the key enabling technologies, namely high speed tip-scanning AFM using innovative flexure design and control algorithm. Another critical element is AFM control using Peak Force Tapping, in which the instantaneous tip-sample interaction force is measured and used to derive a full suite of physical properties at each imaging pixel. We will provide examples of defect review data on different wafers and media disks. The similar AFM-based defect review capacity was also applied to EUV masks.

Proceedings Article | 28 August 2010 Paper

Non-contact stiffness measurement of a suspended single walled carbon nanotube devices

Yun Zheng, Chanmin Su, Stephanie Getty

Proceedings Volume 7764, 77640K (2010) https://doi.org/10.1117/12.861289

KEYWORDS: Electric field sensors, Sensors, Single walled carbon nanotubes, Gold, Silicon, Microelectromechanical systems, Electrodes, Oxides, Doppler effect, Calibration

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Proceedings Article | 22 May 2009 Paper

A control approach to cross coupling compensation of piezotube scanners in tapping-mode imaging

Jian Shi, Ying Wu, Chanmin Su, Qingze Zou

Proceedings Volume 7378, 73781E (2009) https://doi.org/10.1117/12.821813

KEYWORDS: Atomic force microscopy, Scanners, Nanoparticles, Feedback control, Actuators, Control systems, Error analysis, Imaging systems, Inspection, Scanning probe microscopy

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