Atom beams are a longstanding technology for atom-based sensors and clocks. Here, we demonstrate integration of miniature Rb atomic beam using lithographically defined components and passive pumping in a cm-scale device. The device consists of two cavities connected by a series of lithographically defined channels, and the device is fabricated from stack of Si and glass layers which are anodically bonded to form a hermetically seal. The first cavity contains a vapor of atomic Rb which feeds the channel array to produce a set of atomic beams in the second cavity. The channels also provide differential pumping between the two regions, which paired graphite and non-evaporable getters pumps background gases in the second cavity. We present spectroscopy of the atom beam and Rb vapor in the device and comment on the prospects for miniaturized atomic beam clocks.
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