To solve the testing problem of ring surface, a non-splicing interference testing system is designed by combining digital phase measurement technology. Using closed-loop circuit feedback control to realize the precise control of PZT for small displacement, while collecting the N frame sequence interference light intensity map In (x,y). In order to reduce the adjustment error introduced by manual adjustment, the error correction matrix is derived based on the misalignment error model under the cylindrical coordinate system. It has been proved that the testing system can realize high precision detection of 360° rotary cylindrical surface, and a high precision Talyrond565LT cylindrical degree instrument is used to measure the same sample for comparison validation. The experimental results show that the ring surface detection system studied in this paper can realize one-time and high-precision detection of the inner surface of 360° cylinder, and the measurement accuracy PV is better than 0.4λ(0.25μm)and RMS is better than 0.2λ(0.12μm).
Surface shape of precision ring is critical to its performance. To require the whole surface information, more requirements are needed for traditional measurement. A Fizeau type interferometric system is proposed, with a 90° conical mirror the whole cylindrical inner surface can be achieved through one measurement. Considering the introduced errors from the real experiment condition, it is almost impossible to get the real surface information from the inner surface. Any small angular deviation from the 90° cone and misplacement from its ideal position may result in large measurement errors. These errors are hard to be removed before their origins are figured out, also their influence on the measurement results are understood. The principle of the testing setup, the theoretical analysis of main errors based on a cylindrical coordinate, computer simulations by MatLab, and experimental validation are presented in this paper.
A kind of Michelson interference structure is used to improve the round-trip phase correction method and realize the feedback phase stabilization control. In the system, the phase shifter pre-compensation control, 1/4 wave plate debirefringence and Faraday rotator de-polarization sensitivity effectively avoid the polarization fading phenomenon existing in photoelectric detection by external factors, and realize the signal arm carrying phase jitter. At the same time, the AOFS driven by the intermediate frequency signal realizes the construction of the reference arm of the interferometer. Through photoelectric detector to beat frequency of two arms mutual interference signal, the beat frequency signal and intermediate frequency reference signal phase matching, can get the phase perturbation of optical fiber transmission system, the phase discriminator output signal processing can be used as the bias current of SOA control signal, realize the purpose of the feedback control signal phase, has solved the traditional approach to the problem of high frequency signal phase is not convenient to monitor.
The least square method is widely used in data processing and error estimation. The mathematical method has become an essential technique for parameter estimation, data processing, regression analysis and experimental data fitting, and has become a criterion tool for statistical inference. In measurement data analysis, the distribution of complex rules is usually based on the least square principle, i.e., the use of matrix to solve the final estimate and to improve its accuracy. In this paper, a new method is presented for the solution of the method which is based on algebraic computation and is relatively straightforward and easy to understand. The practicability of this method is described by a concrete example.
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