Mr. Daniel L. Chen Profile

Daniel L. Chen

at Micron Technology Taiwan Inc

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Publications (1)

Proceedings Article | 4 December 2008 Paper

Lithography hotspot discovery at 70nm DRAM 300mm fab: process window qualification using design base binning

Daniel Chen, Damian Chen, Ray Yen, Mingjen Cheng, Andy Lan, Rajesh Ghaskadvi

Proceedings Volume 7140, 71400R (2008) https://doi.org/10.1117/12.804563

KEYWORDS: Scanning electron microscopy, Semiconducting wafers, Inspection, Lithography, Modulation, Resolution enhancement technologies, Data analysis, Finite element methods, Defect inspection, Scanners

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