We review a wide range of absorbers based on patterned resistive sheets for use in mid-wave and long-wave infrared microbolometers. These structures range from wavelength selective dielectric coated Salisbury screens to patterned resistive sheets to stacked multi-spectral devices. For basic three color devices in the LWIR band we have designed and fabricated wavelength selective dielectric coated Salisbury screen (DSS) absorbers suitable for use in microbolometers. In order to produce wavelength selective narrowband absorption, the general design rules for DSS microbolometers show that the thickness of the air gap should be a half wavelength and the optical thickness of the dielectric support layer should be a quarter wavelength. This structure is also air gap tunable; i.e., by varying only air gap thickness, the center wavelength of the absorption curve is shifted. FTIR microscope measurements have been made on a number of the different devices demonstrating three color capability in the LWIR while maintain very high efficiency absorption. We have also shown that the use of a patterned resistive sheet consisting of a properly sized array of cross-shaped holes acts as a polarization independent frequency-selective absorber allowing a three-color system spanning the 7-14 micron band. For realistic metal layers the skin effect produces complex surface impedance that can be quite large in the LWIR band. We have shown that metal layers of thickness between one and three skin depths can act as the absorber layer, and have shown that thick metal layers can still produce excellent absorption in the LWIR. Holes in the dielectric support layer also reduce the thermal mass in the system without compromising spectral selectivity. Broadband designs using rectangular holes that produce substantially reduced thermal mass (over 50%) while maintaining efficient spectral absorption have also been found. Finally, we have considered multispectral stacked structures, including Jaumann absorbers and stacked dipole/slot patterned resistive sheets. These structures promise either two band (MWIR/LWIR) or two to three color LWIR in a multi-layer stacked pixel.
A dual-band microbolometer with separate absorption of each wavelength band would be desirable for multispectral applications. In addition, a three dimensional (3D) stacked structure would be advantageous for size and integration in focal plane arrays. We present designs for a 3D stacked dual-band microbolometer based on the in-band and out-of-band reflection and transmission characteristics of resistive dipoles and slots. The mechanism of individual absorption in each layer of a dual-band microbolometer is analyzed and simulated to allow the resistive slot layer to efficiently absorb the LWIR band while a superposed resistive dipole layer absorbs the MWIR band. The top dipole layer is designed to have peak absorption at 5 μm, with a second underlying slot layer and mirror layer designed to have peak absorption at 10 μm. The stacked combination of two different types of layers provides highly efficient wavelength selective absorption, yielding calculated power absorption efficiency of nearly 100 % for both LWIR and MWIR bands.
This paper summarizes ongoing work on applying passive magneto-inductive (MI) waveguides as wireless sensor arrays
to monitor corrosion in infrastructure systems. The passive uniformly-spaced sensor array provides a low-cost and quick
method to detect the onset of corrosion in concrete structures using a noninvasive approach. The embedded sensors
communicate with neighboring sensors through inductive coupling. The corrosion information is interpreted based on
both frequency and time domain characteristics. Bandpass characteristics in the frequency domain and received reflected
time domain waves are investigated to locate the defects along the wireless sensor array. Using the relationship between
the relative positions of defects and MI waveguide performances, a new combined technique to determine location of
defects has been developed and proven to provide both improved sensitivity and defect location capability.
KEYWORDS: Sensors, Corrosion, Passive sensors, Prototyping, Magnetic sensors, Resistance, Phase measurement, Inductive coupling, Structural health monitoring, Chemical elements
This paper describes the ongoing research efforts to develop a novel class of low-cost, unpowered, wireless sensors for
detecting corrosion of reinforcement in concrete structures. The sensors are powered through magnetic coupling
between an external reader coil and an embedded sensor. Measured AC impedance is used to interpret the state of the
embedded sensor. The sensors are envisioned to be placed during construction and interrogated as part of routine
inspections.
The sensor prototype incorporates a sacrificial corroding element that is placed entirely outside the sensor components
and interacts with the resonant circuit by inductive coupling and shielding of the magnetic fields. As the resistance of
the sacrificial element increases due to corrosion, the measured frequency response changes gradually indicating
corrosion initiation within concrete. In this paper the potential for detecting multiple levels of corrosion damage is
demonstrated.
KEYWORDS: Sensors, Transceivers, Reflectometry, Directional couplers, Surveillance, Corrosion, Analog electronics, Signal analyzers, Signal generators, Magnetism
A reconfigurable and portable wireless reader has been designed for embedded passive Electronic Structural
Surveillance (ESS) sensors, used to monitor corrosion in infrastructure systems. The passive ESS sensors have been
developed and proven effective in monitoring localized defects in their environment. They are interrogated by
inductively coupled magnetic field of a reader coil. The input impedance of the reader coil is monitored to determine
whether a corrosion threshold has been reached. We have previously used an impedance analyzer to obtain the
impedance data. Such systems have good sensitivity and moderate speed but are bulky and heavy. The new reader
approach presented in this paper is designed addressing the need of portability, sensitivity and read range. The reader
electronics is implemented on a reconfigurable National Instruments (NI) modular transceiver platform, capable of
software defined radio. The design employs a reflectometer, which is implemented using a 3-port directional coupler and
a single coil as both the driver and reader, along with the transceiver. The NI transceiver is used to generate a swept
frequency input signal and analyze reflected signal from the reader, which is related to the input impedance of our ESS
sensor. The configuration of the reader coil is optimized for reader range and sensitivity. We have acquired analog data
using this design, showing that the real-time reader system facilitates especially fast detection and long read ranges for
threshold-only sensing.
A passive, wireless sensor has been developed at the University of Texas at Austin to monitor the insitu conductivity of
concrete within civil infrastructure systems. Electrical conductivity is one possible indicator of corrosion of embedded
reinforcement and thereby provides information on structural performance. The sensors would be attached to the
reinforcement cages before placement of the concrete and interrogated as part of a routine inspection over the service
life. A new sensor design, a non-contact conductivity sensor, is being developed to minimize the likelihood of damage to
the sensor during placement of the concrete; a metal element is positioned above the sensor body but is not connected to
the resonant circuit within the sensor. In order to verify the response of the non-contact conductivity sensors, they were
submerged in liquids of increasing conductivity. Analysis of the measured data demonstrated that the noncontact
conductivity sensors successfully detected conductivity variations in liquids.
We present fabrication and characterization of wavelength selective germanium dielectric supported microbolometers
using a self-alignment technique to help insure a flat microbolometer membrane. The fabricated microbolometer consists
of a resistive absorber sheet on a quarter wavelength germanium layer above a half wavelength air gap, producing
dielectric interference [1]. We use a self-aligned process without a polyimide patterning process that helps eliminate
deformation and stress in the structure membrane. We demonstrated that the fabricated wavelength selective
microbolometers have flat, robust membranes and produce excellent tunable narrowband absorption in MWIR/LWIR
band with efficient multi-color IR spectral response using wavelength selective pixels.
This paper describes ongoing work to develop a low cost, passive wireless chemical sensor using a microfabricated inductor with interdigitated capacitors (IDC). A self-resonant-structure (SRS) is designed by incorporating IDC electrodes in the inter-winding space of the inductor. The distributed IDC capacitance is affected by dielectric constant and conductivity of its environment or material under test (MUT). This serves as a capacitive transducer changing the resonant frequency of the SRS. The SRS is interrogated using a non-contact inductively coupled reader coil. The shift in resonance frequency of the SRS is used to detect material properties of the environment/MUT. The dielectric constant (ε) and conductivity (σ) can be used to provide information about the surrounding environment. The ε and the σ are determined by fitting and extraction from circuit models of the IDC. Relationship between sensor layout and coupling factor between sensor and reader is investigated. Optimizations of the coupling factor based on this relationship are discussed. IDC design trade-offs between the sensor's sensitivity and coupling factor are investigated. The sensor's response to variety of liquid MUTs with a wide range of dielectric constant and conductivity is presented.
A passive, wireless and inexpensive sensor has been developed to monitor the conductivity of concrete and thereby
provide information on the progress of chloride-induced corrosion of the embedded reinforcement in concrete structures.
Sensors are designed to be attached to the reinforcement cages before placement of the concrete in new construction or
in portions of rehabilitated structures. Sensors will then be interrogated intermittently over the service life during routine
inspections. The results of two experimental investigations are discussed in this paper. In the first, conductivity sensors
were submerged in liquids of increasing conductivity. In the second, conductivity sensors were embedded in concrete
cylinders and interrogated over a 25-week period during initial set and curing of the concrete. Analysis of the measured
data shows that the passive conductivity sensors were successful in detecting a variety of conductivity levels in the
concrete.
A passive sensor platform has been developed at the University of Texas at Austin to monitor corrosion of embedded
reinforcement in concrete structures. The sensors are powered and interrogated in a wireless manner. Initial sensor
designs used a sacrificial corroding steel wire to indicate the risk of corrosion within concrete. The wire was
physically connected to the sensor circuitry and passed through the circuit protection layer. Consequently, it allowed
contaminants to reach the circuit electric components causing corrosion and limiting the service life of the sensor. A
novel sensor configuration that relies on wireless inductive coupling between a resonant circuit and the transducer
element is presented. The non-contact design eliminates the breach concern and enhances the durability of the senor.
Preliminary test results of the new design will be discussed in this paper.
This paper describes the microfabrication process and characterization of wavelength selective germanium dielectric
supported microbolometers, which should be compatible with standard microbolometer fabrication processes. Here we
have demonstrated a micro fabricated robust germanium dielectric structure layer that replaces the usual silicon nitride
structural layer in microbolometers. The fabricated microbolometers consist of a chromium resistive sheet as an absorber
layer above an air-gap/germanium dielectric structure.
Past work has discussed infrared absorption using a patterned thin resistive sheet as the frequency-selective absorber for
use in wavelength-selective long wave infrared (LWIR) microbolometer focal planes arrays. These patterned resistive
sheets are essentially slot antennas formed in a lossy resistive ground plane layer placed a quarter-wavelength in front of
a mirror. Design studies have shown that for efficient IR absorption cross-shaped slots require a lossy sheet with the
optimized sheet resistance. For realistic metal layers, however, the skin effect produces a complex surface impedance
that can be quite large in the LWIR band. In this paper we consider metal layers of thickness between one and three skin
depths as the absorber layer instead of a thin resistive sheet layer, and show that the thick metal layers can still produce
excellent absorption in the LWIR.
This paper summarizes ongoing work to develop low-cost, wireless, resonant sensor nets that can be used to monitor
corrosion in infrastructure systems. A magnetically coupled sensor array is analyzed using a circuit model. The array
acts as a magneto-inductive waveguide and the impedance discontinuities caused by corrosion (or other defects) lead to
reflection. The relationship between the relative position of defects and pass band ripples is investigated, providing a
technique to determine the location of targets. A configuration for increased sensitivity and a method for defect
localization are presented.
The use of a cross-shaped patterned resistive sheet as an infrared-selective absorber, including the effects of a SiNx
mechanical support dielectric layer is discussed. These cross patterned resistive sheets are a modified form of classical
Salisbury Screens that utilize a resistive absorber layer placed a quarter-wavelength in front of a mirror. In comparison
with previously designed patterned resistive sheets that have only a single resistive layer with rectangular patterned
holes, here we consider a resistive absorber layer and a support dielectric layer with cross patterned holes through both
the resistive absorption layer and the support layer.
A class of low-cost, wireless sensor has been developed at the University of Texas at Austin to monitor the performance
of reinforced and prestressed concrete members in civil infrastructure systems. The sensors are designed to be
interrogated in a wireless manner as part of a routine inspection. The sensors do not require batteries or connections to
external power supplies. As such, the sensors are intended to be maintenance free over the service life of the
infrastructure system.
Research efforts to date have focused on detecting the onset of corrosion. It is envisioned that the sensors would be
attached to the reinforcement cages before placement of the concrete. The results of long-term exposure tests will be
used in this presentation to demonstrate the potential and reliability of the resonant sensors.
Results from our efforts to improve the performance of low-cost, unpowered, wireless, resistance based Electronic
Structural Surveillance tags (ESS) will be presented. The ESS tags use an unpowered embedded sensor read by an external reader using an inductively coupled impedance measurement. Read range of coupled tags is largely dependent on the strength of inductive coupling which is influenced by the relative shape and size of the coils. Reader coil geometries can be optimized to increase read range. Additionally, an enhanced circuit model, for data extraction, is developed and tested with the corrosion sensor. The model provides increased information about the sensor and its surroundings. Better coil design and circuit model based data extraction methods can improve the reliability in reading the sensor. Recommendations for design and analysis resulting from this study can be extended to optimize other electronic structural surveillance tag sensors.
KEYWORDS: Sensors, Photodiodes, Transducers, Silicon, Chemical analysis, Diodes, Microfluidics, Photodetectors, Chemiluminescence, Digital signal processing
Results will be reported from efforts to develop a self-contained micromachined microfluidic detection system for the
presence of specific target analytes under the US Office of Naval Research CIED Basic Research Program. Our efforts
emphasize improving/optimizing a dedicated micromachined sensor array with integrated photodetectors that are
coupled to chemically sensitized chemiluminescent receptors. Here we will review our work on the fabrication of
integrated photodiodes within an array of micromachined silicon pyramidal cavities that will contain the
chemiluminescent compounds. One particular advantage of such approach over a conventional planar photodiode would
be its collection efficiency without the use of external optical components. This should allow a more compact and
robust system to be constructed by integrating photodetection and fluidics into a single chip-based platform.
Additionally, overview of accessing the photodiode using wireless coupling to a resonant chemically sensitive tag will
be discussed.
Several designs that could produce significant wavelength selectivity in micromachined microbolometers are reviewed.
These frequency selective surfaces can be achieved using stacks of dielectric coated resistive sheets or by replacing the
normal uniform absorbing sheet used in IR microbolometers with true microbolometers (i.e., bolometers that are much
smaller than the wavelength) combined with an antenna. Here we discuss dielectric coated designs that can substantially
improve the wavelength selectivity of microbolometers.
The use of a patterned resistive sheet acting as an infrared frequency-selective absorber is discussed. These patterned resistive sheets are a modified form of classical Salisbury Screens that utilize a resistive absorber layer placed a quarter-wavelength in front of a mirror. In contrast with previously designed planar antenna-coupled microbolometers that consist of both resistive and highly conductive metal strips (acting as antennas), the absorption layer in these structures involves a single resistive layer with patterned holes.
Results will be reported from efforts to develop a self-contained micromachined microfluidic detection system for the presence of specific target analytes under the US Office of Naval Research Counter IED Basic Research Program. Our efforts include improving/optimizing a dedicated micromachined sensor array with integrated photodetectors and the synthesis of chemiluminescent receptors for nitramine residues. Our strategy for developing chemiluminescent synthetic receptors is to use quenched peroxyoxalate chemiluminescence; the presence of the target analyte would then trigger chemiluminescence. Preliminary results are encouraging as we have been able to measure large photo-currents from the reaction. We have also fabricated and demonstrated the feasibility of integrating photodiodes within an array of micromachined silicon pyramidal cavities. One particular advantage of such approach over a conventional planar photodiode would be its collection efficiency without the use of external optical components. Unlike the case of a normal photodetector coupled to a focused or collimated light source, the photodetector for such a purpose must couple to an emitting source that is approximately hemispherical; hence, using the full sidewalls of the bead's confining cavity as the detector allows the entire structure to act as its own integrating sphere. At the present time, our efforts are concentrating on improving the signal-to-noise ratio by reducing the leakage current by optimizing the fabrication sequence and the design.
In this paper a new low cost, wireless unpowered sensor will be discussed that is designed to monitor the conductivity
of concrete, which may provide information on the ingress of chloride ions during the life of the structure. A method of
extracting temperature information from a previously developed corrosion sensor will also be presented. During a
recent test, both a wireless corrosion sensor and a wireless conductivity sensor were placed in concrete and monitored
throughout the duration of the curing process. Analysis of the data shows it is possible to determine temperature
information based on the corrosion sensor response, allowing wireless in-situ temperature monitoring of the concrete
during the cure. Monitoring curing temperature using the same sensor which would later be used for long-term
corrosion detection would help reduce the cost of such a monitoring system.
The long-term reliability of a prototype, threshold corrosion sensor is demonstrated using data collected during an
eighteen-month accelerated corrosion test. The sensors were embedded in reinforced concrete slabs, subjected to
alternating wet/dry cycles, and interrogated periodically during the test. The frequency signature of the sensor changes
after the steel sensing wire corrodes, providing a convenient and noninvasive technique for determining when a
threshold amount of corrosion has occurred.
The results indicate that the sensor data are reliable, but that some variability of readings should be expected due to the
close tie between the presence of cracks in the concrete and the chloride levels, as the locations of the cracks are not
known at the time that the sensors are embedded in the concrete.
Under a recent US Office of Naval Research University Affiliated Research Center (UARC) Basic Research Program we have begun a number of activities that we hope will enhance future ability to detect the presence of explosives vapors and residues. Here we present initial work on the development of a microfluidic system for a new point chemical sensor allowing the rapid, accurate, and specific detection of vapors emitted by explosive materials. We have already extensively tested a micromachined platform with external optical excitation and detection. Our new chemical approach is to create a receptor with high affinity and selectivity to nitro-explosives. A series of chemiluminescent molecular signaling systems are proposed that are specifically directed toward detection of TNT, PETN, RDX, HMX, and CL-20. These will be used in a new micromachined platform that integrates photodetectors directly into a micromachined micro-fluidic bead platform for detection of the chemiluminescent signals. By integrating photodetectors into the sidewalls of our chemical sensor array, in immediate proximity to the sensing microbeads, we can eliminate all external optics currently required for optical signal collection. This should allow a more compact and robust system to be constructed by integrating photodetection and fluidics into a single chip-based platform. Additionally, a concept of accessing a photodiode using inductive coupling, i.e. non-contact wireless reading, is introduced and demonstrated.
Although the rapid development of 2-D focal plane arrays of thermal infrared (IR) detectors has led to remarkable progress in uncooled IR imaging technology, a major limitation of these sensors is the lack of true on-chip spectral discrimination. Multi-spectral detection capabilities enable rapid, efficient and multi-dimensional scene interpretation that is especially beneficial to advanced IR imaging systems for early threat warning and target recognition applications. We propose a novel design for a monolithic micromachined array of bolometric detectors capable of multi-spectral
imaging in the long-wave IR (7-14 μm) region. The central ingredient of this approach is to employ planar multi-mode antenna structures to efficiently couple incident electromagnetic radiation to a microbolometeric sensing element that is much smaller than the IR wavelength. The wavelength selectivity of such an antenna-coupled detector can be tuned by optimizing its multiple geometric parameters. We present a planar microbolometer design that can accomplish 3-color LWIR imaging with no moving parts analogous to solid-state color videography in the visible region. The proposed effort targets applications of uncooled color IR imaging where the benefits in space, power, weight and complexity will have a significant impact.
Multi-color narrow-band Salisbury Screen and Jaumann Absorbers using optimized thickness Si3N4 layers are designed that produce wavelength selectivity in 7~14μm wavelength band. The Jaumann Absorbers can be used as a vertically stacked pixel structure to save space and enhance resolution compared to frequency selective Salisbury Screens pixels lying in a common plane.
The long-term reliability of a threshold corrosion sensor is demonstrated using data collected during two series of exposure tests. The sensors were embedded in concrete and interrogated in a wireless manner using inductive coupling. The frequency signature of the sensor changes after a steel sensing wire corrodes, providing a convenient and noninvasive technique for determining when a threshold amount of corrosion has occurred in a reinforced concrete structure. In the first series of exposure tests, the sensors were embedded in concrete prisms, which were exposed to a variety of temperature and moisture conditions over a six-month period. In the second series of tests, the sensors were embedded in reinforced concrete slabs. The slabs have been subjected to sustained loads and alternating wet and dry cycles for the past year. Data from both test series indicate that the threshold sensors are functioning as designed.
Prototype sensors have been developed to detect the onset of corrosion in steel reinforced concrete using non-invasive techniques. These sensors are designed to be extremely simple and low cost. The sensors are embedded in the concrete and are powered and interrogated through the use of inductively coupled magnetic fields. A new conductivity sensor is proposed, based on the design of the corrosion sensor. The conductivity sensor design is examined using circuit simulations and initial experimental results. Both sensors could be used together in a corrosion monitoring system.
Eddy current sensing has been successfully used in various applications from testing heat exchange tubes for nuclear power plants to assessing dielectric thickness on printed circuit boards. However, in civil infrastructures cosmetic or cementitious surface material often keeps the probe or reader coil from accessing conductive medium inside the structure, resulting in reduced coupling as the distance increases between the DUT (device under test) and probe. Thus, the direct application of existing eddy current sensing technique is not very useful to detect flaws in civil infrastructures. To address this weak coupling problem, a simple scheme is proposed in which a resonant passive repeater tag is placed between the reader coil and the conducting test target. In this paper, the feasibility of detecting defects like cracks or fractures in conductive medium using a passive resonant tag and remote inductive pick-up as a method of interrogation is shown. Experimental data taken from simple setups to demonstrate the advantage of the proposed scheme are presented.
Combination of micromachined platforms and chemically sensitive micro-beads have been demonstrated for use as multi-analyte chemical and biological agent detectors [1,2]. In many of these systems agarose beads have been used as the "container" of various chemical sensors and enzymes. This paper discusses a method of array assembly using such sub-millimeter size beads.
Multimode microbolometers for wavelength-selective infrared detection have been designed using a Genetic Algorithm and an electromagnetic model of the planar antenna. Wavelength selectivity can be varied by changing the distance to a tuning mirror, or by changing only lithographically drawn parameters, with bandwidth narrower than Fabry-Perot microbolometers. The design of a three color system covering the 7-14 micron band is presented.
The prototype sensors provide a low-cost method to detect the onset of corrosion in concrete structures using a noninvasive approach. The embedded sensors are wirelessly powered by inductive coupling and do not require batteries. Unlike traditional techniques for detecting corrosion which require an electrical connection to the embedded reinforcement, the sensors are self-contained and provide information about the environmental conditions within the concrete in the vicinity of the sensor. The sensors were originally envisioned to provide binary information about the onset of corrosion based on the characteristic frequency of the impedance response. However, more complicated signal processing is required to determine the state of the sensor. The viability of the corrosion sensors is being evaluated through a comprehensive series of laboratory tests using small-scale concrete prisms and large-scale reinforced concrete members.
This paper presents the design, fabrication, and testing of a multi-channel microfluidic system specifically designed for use with porous microbeads that can serve as both reagent sources and detectors. The system contains anisotropically etched reservoirs in which reagent source and detector beads are located, and microchannels that are fabricated on both side of the wafer to connect the each reservoir. Fluids are transported from reagent source bead reservoirs to "downstream" reservoirs containing detector beads. The system employs airflow channels to control liquid flow. Finally, the system is completed with PDMS covers on the top and bottom of the device to seal the channels. We have tested the complete system with sample fluid, showing control of liquid flow using the air channels. The result indicates that this system may be useful in biochemical applications where both reagent sources and receptor sites are combined.
Our society depends heavily on a network of buildings, bridges and roadways. In order to properly maintain this civil infrastructure and avoid damage and costly repairs due to structural failure, it is necessary to monitor the health of these structures. Sensors must frequently be placed in inaccessible locations under harsh conditions and should ideally last the lifetime of the structure the sensors are monitoring. This paper presents the development of a low cost, passive, un-powered wireless analog resistance sensor. The sensor was originally designed for monitoring corrosion in concrete, but there are many other potential applications including remote temperature monitoring, embedded accelerometers, and embedded strain gauges. The passive wireless nature makes the sensor ideally suited for embedding in inaccessible locations under harsh conditions. The sensor consists of a resonant inductor-capacitor circuit containing a resistive transducer. The sensor is interrogated by measuring the impedance through a remote, magnetically coupled reader loop. The width of the resonance is directly related to the resistance of the transducer. The sensor has been simulated under a variety of conditions using a circuit model and compared to actual test sensors built and evaluated in the laboratory.
This paper summarizes the ongoing work at the University of Texas to develop a class of passive, wireless sensors to detect corrosion in reinforced concrete structures. Two prototype sensors have been developed that are designed to be attached to the reinforcing cage before the concrete is placed. The basic and improved sensors are inexpensive to fabricate, sufficiently durable to survive the construction process, can be interrogated through concrete, and provide reliable information about the initiation of corrosion in the adjacent reinforcement. Because the sensors do not contain an internal battery, the expected life of the sensors is expected to be essentially the same as the design life of the structure in which they are embedded.
This paper summarizes the ongoing work at the University of Texas to develop wireless sensors to monitor the condition of civil engineering structures. The state sensors will be attached to or embedded in the structures during construction and will be interrogated during routine inspections of the structure. Each sensor comprises two components: a switch to detect the damage within the structure and a resonant circuit to transmit the information to the inspector. Prototype sensors have been developed to detect the presence of cracks in welded steel construction and corrosion in reinforced concrete construction.
Numerical simulation of the affect of a micromachined tunable Fabry-Perot cavity on the performance of microbolometer is conducted. In particular, the ability of such a tuning structure to allow the determination of effective temperature of an object is studied. Assuming incoming infrared radiation from a blackbody source has a certain distribution of wavelengths for a specific temperature, and scanning over different Fabry-Perot gaps while using a total power detector such as a microbolometer, it is possible to predict the original blackbody spectrum. Comparing the original blackbody spectrum with the predicted spectrum, the optimum interval over which the gaps must be scanned can be determined.
Combinations of micromachined platforms and chemically sensitive micro-beads have been demonstrated for use as multi-analyte chemical and biological agent detectors. Two critical requirements for bead-based chemical detection platforms are bead retention and assembly. Separate “cover layers” have been used in the past for retention, but this constrains fluid flow through the device, and may require the use of precision spacers. In addition, since chemical sensing molecules within the beads can be quite sensitive exposure to high temperatures or harsh chemicals used in micromachining must be avoided after beads are placed in the platform. Here we present a new device whose fabrication is completed before placing the beads, and that provides both bead confinement and a means for self-assembly of arrays. Simple micromachined flexible “fingers” are used for all functions. The micromachined fingers are designed to bend out of the way as a bead is placed into a micromachined storage well, but then snap back after the bead is fully inserted into the well. We have also demonstrated that by designing different sized openings over each well it is possible to construct self-assembling bead arrays.
A micromachined fluidic sensor array for the rapid characterization of multiple analytes in solution has been developed. A simple micromachined fluidic structure for this biological and chemical agent detection system has been designed and fabricated, and the system has been tested. Sensing occurs via optical changes to indicator molecules that are attached to polymeric microspheres (beads). A separate charged-coupled- device (CCD) is used for the simultaneous acquisition of the optical data from the selectively arranged beads in micromachined etch cavities. The micromachined bead support structure has been designed to be compatible wit this hybrid optical detection system. The structure consists of four layers: cover glass, micromachined silicon, dry film photoresist, and glass substrate. The bottom three layers are fabricated first, and the beads are selectively placed into micromachined etch cavities. Finally, the cover glass is applied to confine the beads. This structure utilizes a hydrophilic surface of the cover glass to draw a liquid sample into the sensor array without moving components, producing a compact, reliable, and potentially low-cost device. We have initially characterized fluid flow through a complete chip, showing complete filling of the sample chamber in approximately 2 seconds. The test results show that this system may be useful in micro total analysis systems ((mu) - TAS), especially in single-use biomedical applications.
Composite dye/superconductor sensors which can discriminate different wavelengths of light in the visible and near- infrared regions have been fabricated. By lithographically patterning 1500 angstroms thick films of the superconductor YBa2Cu3O7-δ on MgO substrates, arrays of microbridges have been created. A layer of dye dispersed in a polymeric matrix is deposited on top of each bridge to create the wavelength selective light absorbing element. Each meandering path bridge is approximately 20 μm wide and approximately 10 mm long. The device functions in a different manner to traditional semiconductor-based light sensing technologies in which a dye structure serves the role of a filtering agent. Here, the response of the hybrid dye/superconductor element is amplitude at wavelengths strongly absorbed by the dye laser. Such devices represent the initial steps towards a larger structure capable of simultaneously sensing wavelength bands from the visible through to the infrared. In addition to dye sensitization method, another approach to adding wavelength selectivity to detectors is described here in which interference effects in micromachined microbolometers are exploited.
The rational design of small molecules for the selective complexation of analytes has reached a level of sophistication such that there exists a high degree of prediction. An effective strategy for transforming these hosts into sensors involves covalently attaching a fluorophore to the receptor which displays some fluorescence modulation when analyte is bound. Competition methods, such as those used with antibodies, are also amenable to these synthetic receptors, yet there are few examples. In our laboratories, the use of common dyes in competition assays with small molecules has proven very effective. For example, an assay for citrate in beverages and an assay for the secondary messenger IP3 in cells have been developed. Another approach we have explored focuses on multi-analyte sensor arrays with attempt to mimic the mammalian sense of taste. Our system utilizes polymer resin beads with the desired sensors covalently attached. These functionalized microspheres are then immobilized into micromachined wells on a silicon chip thereby creating our taste buds. Exposure of the resin to analyte causes a change in the transmittance of the bead. This change can be fluorescent or colorimetric. Optical interrogation of the microspheres, by illuminating from one side of the wafer and collecting the signal on the other, results in an image. These data streams are collected using a CCD camera which creates red, green and blue (RGB) patterns that are distinct and reproducible for their environments. Analysis of this data can identify and quantify the analytes present.
Steven Savoy, John Lavigne, J. Yoo, John Wright, Marc Rodriguez, Adrian Goodey, Bridget McDoniel, John McDevitt, Eric Anslyn, Jason Shear, Andrew Ellington, Dean Neikirk
A micromachined sensor array has been developed for the rapid characterization of multi-component mixtures in aqueous media. The sensor functions in a manner analogous to that of the mammalian tongue, using an array composed of individually immobilized polystyrene-polyethylene glycol composite microspheres selectively arranged in micromachined etch cavities localized o n silicon wafers. Sensing occurs via colorimetric or fluorometric changes to indicator molecules that are covalently bound to amine termination sites on the polymeric microspheres. The hybrid micromachined structure has been interfaced directly to a charged-coupled-device that is used for the simultaneous acquisition of the optical data from the individually addressable `taste bud' elements. With the miniature sensor array, acquisition of data streams composed of red, green, and blue color patterns distinctive for the analytes in the solution are rapidly acquired. The unique combination of carefully chosen reporter molecules with water permeable microspheres allows for the simultaneous detection and quantification of a variety of analytes. The fabrication of the sensor structures and the initial colorimetric and fluorescent responses for pH, Ca+2, Ce+3, and sugar are reported. Interface to microfluidic components should also be possible, producing a complete sampling/sensing system.
A micromachined silicon Fabry-Perot interferometric sensor is demonstrated as an optical chemical sensor. This sensor is based on the combined nature of the amplifying and tuning characteristics of the Fabry-Perot microcavity structure and the doping effect of polymer films such as Poly(3- dodecylthiophene) (P3DDT) upon exposure to an oxidizer, in this case, iodine. The fabricated Fabry-Perot chemical sensors show reversible sensing behavior with a maximum change in transmitted optical intensity of 60%. Significant improvement of the sensing performance is obtained from the Fabry-Perot microcavity structure compared to a simple planar single membrane structure, which indicates the resonant effect of the Fabry-Perot cavity on the chemical sensor. The measured sensing characteristics suggest that the change in absorptance of P3DDT polymer inside the microcavity plays a major role, while the deflection of a microcavity membrane by the P3DDT polymer-induced surface tension gives tunability of the sensor to maximize the amplification of output response by adjusting the Fabry- Perot microcavity gap spacing.
Micromachined Fabry-Perot microcavity structures have been investigated for use as pressure sensors. For the application of pressure sensors, the devices are categorized based on the shape and location of the deflecting diaphragm. Discussed here are planar bottom, planar top, and corrugated top diaphragm Fabry-Perot microcavity structures. Output signal degradation as a function of pressure, referred to as the signal averaging effect, caused by the non-planar deflection of an edge-clamped diaphragm, is reduced using planar top diaphragm structures, as compared to planar bottom diaphragm structures. This is achieved by improving the flatness of the deflecting diaphragm in the optically sampled area of the planar top diaphragm structures by adjusting the ratio of the top diaphragm area to the bottom diaphragm area. Corrugation of the top diaphragm structure further enhances flat deflection. However, the corrugated structures induce a static deflection of the diaphragm due to localized internal stress generated by the asymmetry of the corrugation on the diaphragm, referred to as the zero- pressure offset effect. The existence and influence of these parasitic effects have been observed using real-time measurements of the diaphragm deflection.
Here we present results for a new inductive proximity sensor that makes use of two coupled coils, forming a planar transformer, fabricated on a micromachined membrane. Macroscopic proximity sensors based on eddy-current techniques are currently commercially available. However, their design is not conducive to scaling inductor. When such an inductor is scaled down and made planar, the inductance decreases while the resistance of the coil increases dramatically. This dictates that the sensor be operated at much higher frequencies for which the inductance of the coil dominates its resistance. In our new two-coil design a signal is applied across the primary coil and a significant sensitivity to the gap to the 'target' plate is seen in the phase difference between the primary and secondary output. This phase change is largely invariant with change in coil resistance (due to either temperature change or change due to scaling to IC levels), allowing operation at lower frequencies than that required for a single coil proximity sensor. By fabricating the transformer on the back side of a micromachined membrane, the coil is protected from the environment, while the deleterious effect of the silicon substrate on inductance is eliminated.
A monolithically integrated Fabry-Perot cavity pressure transducer has been fabricated using micromachining techniques that are fully compatible with silicon IC processing technology. Surface micromachining can produce a high quality micro cavity without the wafer bonding process that has been commonly used in previously fabricate Fabry-Perot pressure transducers. Dielectric film stacks consisting of layers of silicon nitride and silicon dioxide were used as mirrors. An air gap cavity was formed by selectively etching a sacrifical polysilicon layer. Remote pressure measurement was demonstrated using the micromachined Fabry-Perot cavity and a multimode optical fiber interconnect. The measured response of the sensor has been compared with theoretical simulation which takes into account the averaging effect caused by the shape of the deflected mirror in the cavity.
RHEED oscillations were studied for GaAs growth for azimuthal angles of 0 degree(s) and 15 degree(s) as the angle of incidence was changed between 0.4 degree(s) and 1.7 degree(s). The angle of incidence was then held constant while the azimuthal angle was varied from 0 degree(s) to 85 degree(s). From the recorded oscillations the static surface intensity, oscillation intensity, oscillation phase, and dampening were extracted. The static surface intensity was found to change with angle and displayed a trend very similar to that reported in the literature. The intensity of the oscillations was found to vary periodically with angle of incidence and thus supported the theory that interference between layers of different height is one source of the oscillations. However, the phase of the oscillations deviated from that predicted by a simple, kinematic-scattering interference model. The dampening of the oscillations was found to vary strongly with angle of incidence. There existed a range of angles of incidence over which the phase was close to that expected for a simple interference model and for which the dampening was essentially constant.
The TREMBOL (transition-edge microbolometer) and the composite TREMBOL are introduced as detectors for FIR imaging arrays. The TREMBOL uses a superconductor's sharp change in resistance at the normal conduction to superconduction transition. The structure of the composite TREMBOL enables heating of the individual detectors in an array up to their transition temperature, and can thus be used in multiplexing, which would be very advantageous for two-dimensional arrays.
Three models are presented for resonant tunneling diodes (RTD). These models range in complexity from a full quantum kinetic equation based on the Crystal Wigner function approach to a simple phenomenological model based on the drift-diffusion equation. Of these three, the Crystal Wigner function has the capability of properly accounting for complex band structure transport issues within the quantum well region.
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