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Dr. Gerald Lopez
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Publications (1)
Proceedings Article | 25 March 2019 Paper
Charge dissipation by use of a novel aqueous based quaternary ammonium compound for use in electron beam lithography on non-conductive substrates
Gerald Lopez, Glen de Villafranca, Grant Shao, Meiyue Zhang, Andrew Thompson
Proceedings Volume 10960, 1096027 (2019) https://doi.org/10.1117/12.2524294
KEYWORDS: Electron beam direct write lithography, Electron beam lithography, Metals, Polymers, Silica, Nanotechnology, Polymer thin films, Gold, Silicon, Thin film coatings, Glasses
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