Guannan Li
at Institute of Microelectronics of the CAS
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 27 September 2024 Paper
Na Wang, Xiaojiao Song, Weihu Zhou, Guannan Li, Lituo Liu
Proceedings Volume 13282, 132820L (2024) https://doi.org/10.1117/12.3046321
KEYWORDS: Semiconducting wafers, Imaging arrays, Light sources and illumination, Computer simulations, Light sources, Wafer level optics, Objectives, Optical surfaces, Silicon, Optical testing

Proceedings Article | 24 November 2023 Paper
Na Wang, Lituo Liu, Genzi Li, Xiaojiao Song, Dezhao Wang, Guannan Li, Weihu Zhou
Proceedings Volume 12935, 129354K (2023) https://doi.org/10.1117/12.3008043
KEYWORDS: Optical components, Defect detection, Glasses, Optical microscopy, Imaging systems, Nondestructive evaluation, Statistical analysis, Confocal microscopy, Analytical research, Aluminum

SPIE Journal Paper | 27 August 2019
Lituo Liu, Guannan Li, Weihu Zhou, Xiaobin Wu, Yu Wang
JM3, Vol. 18, Issue 03, 034002, (August 2019) https://doi.org/10.1117/12.10.1117/1.JMM.18.3.034002

Proceedings Article | 26 March 2019 Paper
Proceedings Volume 10959, 109592A (2019) https://doi.org/10.1117/12.2511169
KEYWORDS: Particles, Semiconducting wafers, Silicon, Pulsed laser operation, Spectroscopy, Laser applications, Copper, Laser systems engineering

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