The developments of high performance InGaN based micro-light-emitting diodes (µLEDs) are discussed. Through novel epitaxial growth and processing, and transparent packaging we have achieved external quantum efficiencies as high as 58% EQE at 450nm for MmicroLEDs. The critical challenges of µLEDs, namely full-color scheme, decreasing pixel size and mass transfer technique, and their potential solutions are explored. Recently, we have demonstrated efficient microLEDs emitting in the blue to green at dimensions as small of 1 micron. Red InGaN based red MicroLEDs with efficiencies of 2.5% has also been fabricated.
We propose a new Fabry-Perot (FP) GaN laser fabrication method utilizing an epitaxial lateral overgrowth (ELO) technique and m-plane cleavability of the GaN crystal. The removed m-plane InGaN laser having a lasing wavelength 408. 1 nm operated at a low threshold current density as low as 2.15 kA/cm2. First, unlike a conventional ELO growth technique, we avoid coalescence between adjacent ELO layers, thus forming island-like ELO layer bars, which were later used as the base for FP GaN laser. Then, a laser device epilayers were epitaxially grown and laser ridge structure was fabricated on each of these non-coalesced island-like ELO base layers. Island-like ELO laser bar formation facilitates an easy removal of the laser bars mechanically using a commercially available adhesive polymer film. Our investigation found that cleavable m-plane of the GaN crystal assists in the liftoff of the fabricated m-plane InGaN FP lasers. We further confirm that the reported fabrication method can be adopted to semi-polar crystal plane orientations of GaN.
We have successfully fabricated 7-μm 155-nm-thick undercut microdisk cavities with AlN / Al0.60Ga0.40N (5.5 nm / 2.5 nm) multiple quantum wells epitaxially grown on Si substrate by metal–organic chemical vapor deposition. Upon optical pumping, whispering-gallery modes (WGMs) with wavelengths around ∼250 nm can be observed throughout the photoluminescence spectrum at room temperature, with quality factors around 500 to 1000. These cavity modes have been analyzed by theoretical calculations. Our results suggest great potentials to demonstrate WGM lasing in the UVC range from these AlGaN/AlN-on-Si microdisk cavities monolithically grown on a Si platform.
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