Prof. Javier Read de Alaniz Profile

Prof. Javier Read de Alaniz

at Univ of California Santa Barbara

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Publications (2)

Proceedings Article | 1 May 2023 Presentation + Paper

Photoresists with precisely controlled molecular weight, composition, and sequence

Florian Kaefer, Zoey Meng, Rachel Segalman, Javier Read de Alaniz, Christopher Ober

Proceedings Volume 12498, 124980F (2023) https://doi.org/10.1117/12.2658582

KEYWORDS: Photoresist materials, Polymers, Stochastic processes, Solubility, Chemical composition, Lithography, Polymerization, Nitrogen, Extreme ultraviolet lithography

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Proceedings Article | 1 May 2023 Presentation + Paper

Sequence-defined polypeptoid CARs for electron-beam and EUV lithography

Florian Kaefer, Christopher Ober, Zoey Meng, Rachel Segalman, Javier Read de Alaniz

Proceedings Volume 12498, 1249817 (2023) https://doi.org/10.1117/12.2658413

KEYWORDS: Lithography, Extreme ultraviolet lithography, Solubility, Polymers, Solids, Photoacid generators, Extreme ultraviolet, Electron beam lithography, Chemical composition, Switching

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