Dr. Jeremy D. Bergeson Profile

Dr. Jeremy D. Bergeson

at EPIR Technologies Inc

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Author

Publications (3)

Proceedings Article | 17 September 2014 Paper

Mid and long wavelength infrared HgCdTe photodetectors exposed to proton radiation

Jeremy Bergeson, Ramana Bommena, Stephen Fahey, Vincent Cowan, Christian Morath, Silviu Velicu

Proceedings Volume 9226, 92260P (2014) https://doi.org/10.1117/12.2064074

KEYWORDS: Long wavelength infrared, Mid-IR, Mercury cadmium telluride, Photodetectors, Staring arrays, Radiation effects, Silicon, Sensors, Diodes, Readout integrated circuits

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Proceedings Article | 24 June 2014 Paper

High-performance SWIR HgCdTe FPA development on silicon substrates

R. Bommena, J. Bergeson, R. Kodama, J. Zhao, S. Ketharanathan, H. Schaake, H. Shih, S. Velicu, F. Aqariden, P. Wijewarnasuriya, N. Dhar

Proceedings Volume 9070, 907009 (2014) https://doi.org/10.1117/12.2053020

KEYWORDS: Short wave infrared radiation, Mercury cadmium telluride, Sensors, Silicon, Staring arrays, Quantum efficiency, Indium gallium arsenide, Detector arrays, Data modeling, Antireflective coatings

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Proceedings Article | 21 May 2014 Paper

Miniaturized imaging spectrometer based on Fabry-Perot MOEMS filters and HgCdTe infrared focal plane arrays

S. Velicu, C. Buurma, J. Bergeson, Tae Sung Kim, J. Kubby, N. Gupta

Proceedings Volume 9100, 91000F (2014) https://doi.org/10.1117/12.2053902

KEYWORDS: Electronic filtering, Reflectivity, Spectroscopy, Semiconducting wafers, Infrared imaging, Infrared radiation, Interfaces, Staring arrays, Long wavelength infrared, Spectral resolution

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Imaging spectrometry can be utilized in the midwave infrared (MWIR) and long wave infrared (LWIR) bands to detect, identify and map complex chemical agents based on their rotational and vibrational emission spectra. Hyperspectral datasets are typically obtained using grating or Fourier transform spectrometers to separate the incoming light into spectral bands. At present, these spectrometers are large, cumbersome, slow and expensive, and their resolution is limited by bulky mechanical components such as mirrors and gratings. As such, low-cost, miniaturized imaging spectrometers are of great interest. Microfabrication of micro-electro-mechanicalsystems (MEMS)-based components opens the door for producing low-cost, reliable optical systems. We present here our work on developing a miniaturized IR imaging spectrometer by coupling a mercury cadmium telluride (HgCdTe)-based infrared focal plane array (FPA) with a MEMS-based Fabry-Perot filter (FPF). The two membranes are fabricated from silicon-oninsulator (SOI) wafers using bulk micromachining technology. The fixed membrane is a standard silicon membrane, fabricated using back etching processes. The movable membrane is implemented as an X-beam structure to improve mechanical stability. The geometries of the distributed Bragg reflector (DBR)-based tunable FPFs are modeled to achieve the desired spectral resolution and wavelength range. Additionally, acceptable fabrication tolerances are determined by modeling the spectral performance of the FPFs as a function of DBR surface roughness and membrane curvature. These fabrication non-idealities are then mitigated by developing an optimized DBR process flow yielding high-performance FPF cavities. Zinc Sulfide (ZnS) and Germanium (Ge) are chosen as the low and the high index materials, respectively, and are deposited using an electron beam process. Simulations are presented showing the impact of these changes and non-idealities in both a device and systems level.

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