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Jiali Gao
at Dalian Univ of Technology
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Publications (1)
SPIE Journal Paper | 1 June 2012
Mechanical characterization of SU-8 thin films through varying effective aspect ratios for microelectromechanical systems application
Jinkui Chu, Jiali Gao, Le Guan, Guoqing Zhang, Ze Liu
JM3, Vol. 11, Issue 02, 023006, (June 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.2.023006
KEYWORDS: Thin films, Photoresist materials, Microelectromechanical systems, Numerical simulations, Testing and analysis, Semiconducting wafers, Photomicroscopy, Ultraviolet radiation, Polymers, Finite element methods
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