Unlike the large array of microcantilever design which covers entire recording media area adopted by majority researchers in probe storage, we have designed and fabricated two types of small-sized array of (20X1 and 30X1) microcantilevers, which is driven by an electromagnetic translational actuator to targeted media area, for carrying out recording functions on a relative larger recording media area. This paper presents the prototype of a small-sized microcantilever probe tip array for use in the promising high-density thermo-mechanical data storage technology. Characterization of the microcantilever probe tip such as current versus voltage measurement, thermal time constant measurement and heat emission phenomenon at heater platform were investigated. Preliminary hole indentation or data bit formation results by utilizing the fabricated small-sized microcantilever probe tip array were demonstrated on poly methyl methacrylate (PMMA) recording media.
A single crystal silicon MEMS microactuator for high density hard disk drives is described in this paper. The microactuator is located between a slider and a suspension, and drives the slider on which a magnetic head is attached. The MEMS actuator is fabricated by improved LISA process. It has an electrically isolated 20:1 (40micrometers thick, 2micrometers width) high aspect ratio structure directly processed from a single crystal silicon substrate. The overall dimension of the micro-actuator is 1.4mm by 1.4mm and by a thickness of 0.15mm. Experiments show that +/- 0.6 micrometers displacement stroke of the Read/Write magnetic head, which is attached on the MEMS actuator, can be achieved when input voltage is 40V. The dynamic performances of the MEMS actuator integrated with a Head Gimbal Assembly (HGA) are analyzed by FEM Simulation. The simulation results demonstrated that the controllable in-plane resonance frequency of the MEMS actuator is 1.5 kHz, and the first uncontrollable out-of- plane resonance frequency of the MEMS actuator integrated with the HGA is 16.6kHz. The single crystal silicon microactuator has good shock reliability, and eliminates large material creep and thermal mismatch problems.
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