Photodiode structures were integrated in a low cost 0.5 μm silicon BiCMOS process using standard process flow without any technology modification. Rise times of 1.3ns and 1.4ns were measured for wavelengths λ of 660nm and 780nm with a responsivity of 0.23 A/W and 0.14 A/W, respectively. Photodiodes with a high responsivity of 0.42 A/W are reaching a risetime of 4ns for λ = 780nm. Comparable low values for the risetime at 780nm are reported in the literature for integrated photodiodes in standard silicon technologies only with a modification of the epitaxial substrate material. So this photodiodes are suitable for a wide variety of low-cost high-speed optical sensor applications, for optical fiber communication and fiber in home applications.
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