Prof. Jose J. Estabil Profile

Prof. Jose J. Estabil

President at Tau-Metrix Inc

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Publications (2)

Proceedings Article | 15 March 2006 Paper

First look at across-chip performance and process noise using non-contact performance-based metrology

Majid Babazadeh, Bertrand Borot, Wim Doedel, José Estabil, Jean Galvier, Gloria Johnson, Nader Pakdaman, Gary Steinbrueck, James Vickers

Proceedings Volume 6155, 615502 (2006) https://doi.org/10.1117/12.683362

KEYWORDS: Semiconducting wafers, Metrology, Reticles, Oscillators, Metals, Manufacturing, Logic, Design for manufacturing, Nondestructive evaluation, CMOS technology

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Proceedings Article | 21 May 1993 Paper

Electromigration and current-carrying implications for aluminum-based metallurgy with tungsten stud via interconnections

Hazara Rathore, R. Filippi, R. Wachnik, Jose Estabil, Thomas Kwok

Proceedings Volume 1805, (1993) https://doi.org/10.1117/12.145481

KEYWORDS: Copper, Resistance, Aluminum, Diffusion, Metals, Tungsten, X-rays, Oxides, Thin films, Titanium

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