Mr. Keng Heng Lai Profile

Keng Heng Lai

at A*STAR Institute of Microelectronics

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Publications (2)

Proceedings Article | 13 March 2024 Presentation + Paper

High efficiency metalens design using wavefront error optimization

Narak Choi, Keng Heng Lai, Yuan Hsing Fu

Proceedings Volume 12897, 128970A (2024) https://doi.org/10.1117/12.3002182

KEYWORDS: Wavefront errors, Design, Simulations, Mathematical optimization, Phase shifts, Finite-difference time-domain method, Computation time, Wavefronts

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Proceedings Article | 15 March 2023 Presentation + Paper

Model-based optical proximity correction for immersion lithography-based flat optics platform

Narak Choi, Keng Heng Lai, Arvind Sundaram, Navab Singh, Yuan Hsing Fu, Lennon Y. T. Lee

Proceedings Volume 12432, 1243205 (2023) https://doi.org/10.1117/12.2647686

KEYWORDS: Optical proximity correction, Flat optics, Critical dimension metrology, Optical lithography, Manufacturing, Lithography, Design and modelling

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