Ultrashort laser pulses in the deep ultraviolet (DUV) based on nonlinear-optical conversion of NIR solid state sources promise advantages for the machining of wide-bandgap materials such as compound semiconductors like indium / aluminum / gallium nitride (InAlGaN, AlN, GaN), silicon carbide (SiC), zinc sulfide (ZnS), or boron nitride (BN). We present systems providing few-picosecond pulses at 257.5 nm with high average power exceeding 20 W of DUV obtained by frequency quadrupling of our proven TruMicro Series of industrial ultrafast amplifiers. High beam quality and decent lifetime of the DUV optics are demonstrated.
The surface treatment of micro- and nanolayers by means of linear scanning with a line-shaped laser beam gains more and more importance for advanced products. Laser annealing of functional layers to enhance material properties is already an established process, e.g. for coatings on architectural glass or in advanced electronic components, such as flat panel displays. Due to their flexibility, anamorphic beam shaping and homogenization of high-power laser beams constantly find further applications in the selective heating of thin layers. One of these applications is debonding of flexible OLED displays, so called laser lift-off, which was introduced just in recent years. The performance of a laser lift-off system highly depends on the optical properties of the line beam. Good homogeneity in long axis direction, high energy density and sufficient depth of focus are crucial for reliable processing results. However, future system concepts will have to consider additional requirements of an industrial manufacturing environment as the application is maturing. We present a system for laser lift-off of flexible OLED displays, which focuses on a compact and rugged design. Starting from an existing system concept of a line focus system in the infra-red regime we define the requirements for a transition to the ultra-violet spectral range and discuss both, optical and mechanical layout. The optical key parameters are presented and validated by simulation and experiment. We demonstrate the implementation of a functional model.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.