A flexible tactile sensing module with NiCr strain gauges as sensing elements was fabricated by polymer MEMS
technology using polyimide materials where the one was the photo-definable polyimide precursor and the other was nonphoto-
definable. The unit sensor cell size of 32×32 tactile sensor array was 1mm × 1mm cell and its overall size was
5.5cm × 6.5cm. Especially, both the tactile sensor arrays and the pluggable terminals as flexible flat cable were
fabricated on the same polymer substrate easily to be connected the sensor array with a PCB board. The fabricated tactile
sensing module was measured continuously in the normal force range of 0~1N with tactile sensor evaluation system. The
value of resistance was relatively linear with normal force in the overall range of 0~1N. However, the variation of
resistance was decreased by more than 0.6N. The variation rate of resistance was 2.0%/N in the range of 0~0.6N and
1.5%/N in the range of 0.6~1N. Image display was identified corresponding by distribution of applied force. The
flexibility of the sensing module was adequate to be placed on any curved surface as a cylinder.
In this paper we present a micromirror fabrication technique without using silicon-on-insulator (SOI) wafers. Torsional electrostatic micromirrors have been fabricated using a combination of chemical mechanical polishing (CMP) process and anodic bonding. The size of fabricated silicon mirror plate was 610×400 μm2 and 20 μm thick. The steering electrodes have been fabricated in the dry etched trench on the glass wafer by electroplating process and CMP processing without damage of electrodes during anodic bonding process. The surface roughness of polished silicon micromirror(Ra) was 3.19nm. The single crystal silicon mirrors are electrostatically actuated with parallel bottom electrodes placed 8 μm below the mirror plate, and they could be stably operated in a ±1.1°. The pull-in voltage has been measured as 520 V. The resonant frequency of the fabricated torsion mirror was 47.3 kHz.
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