KEYWORDS: Microelectromechanical systems, Sensors, Analog electronics, Smart sensors, Gyroscopes, Linear filtering, Signal processing, Digital electronics, Systems modeling, Device simulation
The extended use of microelectromechanical systems (MEMS) in the development of new microinstrumentation for aerospatial applications, which combine extreme sensitivity, accuracy and compactness, introduced the need to simplify their design process in order to reduce the design time and cost. The recent apparition of analogue and mixed signal extensions of hardware descriptions languages (VHDL-AMS, Verilog-AMS and SystemC-AMS) permits to co-simulate the HDL (VHDL and Verilog) design models for the digital signal processing and communication circuitry with behavioral models for the non digital parts (analog and mixed signal processing, RF circuitry and MEMS components). Since the beginning of the microinstrumentation design process the modeling and simulation could help to define better the specifications and in the architecture selection and in the SoC design process in a more realistic environment. We will present our experience in the application of these languages in the design of microinstruments by using behavioral modeling of MEMS.
KEYWORDS: Smart sensors, Sensors, Microelectromechanical systems, Linear filtering, Systems modeling, Analog electronics, Integrated circuit design, Oscillators, Signal processing, Mathematical modeling
The objective of this work is to develop a modeling of a complete smart sensor to be used in a distributed architecture, with the new modeling language, VHDL-AMS. This smart sensor is composed by a sensor or actuator, for example we have used a piezoresistive accelerometer, its signal conditioning module, with both analogue and digital elements, and a bus driver that allows communication with the instrument control device and other sensors. In that way, it is also possible to introduce these microsensors in a distributed architecture that permits communication between microinstruments. This example of modeling through VHDL-AMS shows how this language allows a multitechnological description of a microsystem, including not only electrical signals, but also thermical, kinematic, fluidic, etc. signals. This language also permits to describe systems in different levels of complexity and abstraction, giving the possibility of covering several models from a physical model until a behavioral model, which can be used to obtain a design methodology for MEMS, analogous to the existent design methodology for integrated circuits. The combination of smart sensors models at behavioral level with the microinstrument control circuit models is a first step in the development of a complete design methodology.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.