CONFERENCE PROCEEDINGS
Advanced Search
Dr. Lawrence Levit
at TREK Inc
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 17 December 2003 Paper
Induced ESD damage on photomasks: a reticle evaluation
Andrew Rudack, Michael Pendley, Patrick Gagnon, Lawrence Levit
Proceedings Volume 5256, (2003) https://doi.org/10.1117/12.518126
KEYWORDS: Reticles, Metals, Electromagnetic coupling, Electrodes, Photomasks, Atomic force microscope, Nanotechnology, Antennas, Oscilloscopes, Inspection
Proceedings Article | 30 July 2002 Paper
Mask damage by electrostatic discharge: a reticle printability evaluation
Andrew Rudack, Lawrence Levit, Alvina Williams
Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474516
KEYWORDS: Reticles, Atomic force microscopy, Optical microscopes, Photomasks, Metrology, Optical lithography, Foam, Ions, Photoresist materials, Semiconducting wafers
Proceedings Article | 11 March 2002 Paper
Measurement of the magnitude of triboelectrification in the environment of the 157-nm stepper
Lawrence Levit, Wei Guan
Proceedings Volume 4562, (2002) https://doi.org/10.1117/12.458305
KEYWORDS: Humidity, Reticles, Nitrogen, Quartz, Oxygen, Environmental sensing, Vacuum ultraviolet, Lithography, Electrons, Atmospheric physics
Proceedings Article | 9 April 2001 Paper
Canary reticle: a new diagnostic for reticles and a window into the physics of ESD damage to reticles
Proceedings Volume 4349, (2001) https://doi.org/10.1117/12.425101
KEYWORDS: Reticles, Diagnostics, Dielectrics, Quartz, Physics, Photomasks, Ions, Semiconducting wafers, Aluminum, Electrodes
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top