Based on Jones matrices theory, the error source and action mechanism of polarized interferometer using four-channel
orthogonal signals in nanometer level measurement are researched. It opens a door for selecting optical components,
adjusting light set-up and compensating error.The mechanism of nonlinear errors and the variance law of nonlinear errors
in laser interferometer, which is caused by nonideal factors of 1/4 wave plates or 1/2 wave plate or all of them, based on
polarized phase-shift technology. In this paper, every single error on the polarized interferometer is discussed with the
isolation of each wave plate, so that the character of nonlinear error will be reached with composite error. In the
experiments, difference delay angle error of two 1/4 wave plates and location angle error is -5°∼5°in interferometer. The
aim of this paper is to realize the mechanism of nonlinear errors and the varying rule of nonlinear errors in laser
interferometer. All above provide error remove or compensation for laser interferometer in nanometer level measurement
with theoretical foundation and search after application.
Based on Jones matrices theory and polarized phase-shift technology, one of the most important elements of polarized interferometer that is the error source and action mechanism of wave plates is researched. There are two reasons that cause wave plate error, one of which is immanent parameter error and the other one is location error. When environmental temperature changes and vibratory jam exists, the error of different elements will couple, which makes nonlinear error on the polarized interferometer more complex. It opens a door for selecting wave plates, adjusting light set-up and compensating error. In this paper, the point is the experiments on the wave plate error, which is on the base of theory. Every single error on the polarized interferometer is discussed with the isolation of each wave plate, so that the character of nonlinear error will be reached with composite error. In the experiments, difference delay angle error of two 1/4 wave plates is -10 degrees~10 degrees and location angle error is -5 degrees~5 degrees in interferometer. The aim of this paper is to realize the mechanism of nonlinear errors' appearance and the varying rule of nonlinear errors in laser interferometer. The effects of the environmental factors (temperature and oscillation) on the measurement accuracy and the compensation for the environmental changes are also studied. All above provide error remove or compensation for laser interferometer in nanometer level measurement with theoretical foundation and search after application.
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