Dr. Lina Shen Profile

Dr. Lina Shen

at Shanghai Institute of Optics and Fine Mechanics

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Publications (2)

SPIE Journal Paper | 20 October 2015

Analytical analysis of the impact of polarization aberration of projection lens on lithographic imaging

Lina Shen, Sikun Li, Xiangzhao Wang, Guanyong Yan

JM3, Vol. 14, Issue 04, 043504, (October 2015) https://doi.org/10.1117/12.10.1117/1.JMM.14.4.043504

KEYWORDS: Polarization, Lithography, Photomasks, Imaging systems, Diffraction, Lithographic illumination, Computer simulations, Image analysis, Zernike polynomials, Image processing

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Proceedings Article | 18 March 2015 Paper

Analytical analysis for impact of polarization aberration of projection lens on lithographic imaging quality

Lina Shen, Sikun Li, Xiangzhao Wang, Guanyong Yan

Proceedings Volume 9426, 94261E (2015) https://doi.org/10.1117/12.2181336

KEYWORDS: Polarization, Lithography, Imaging systems, Diffraction, Photomasks, Received signal strength, Zernike polynomials, Image analysis, Matrices, Amplifiers

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