This conference presentation was prepared for the Millimeter, Submillimeter, and Far-Infrared Detectors and Instrumentation for Astronomy XI conference at SPIE Astronomical Telescopes + Instrumentation, 2022.
Laser direct writing of optical devices and circuits is attracted attention because of its ability of three-dimensional fabrication without any mask[1]. Recently, Yb-fiber or solid-state laser has been commonly used for fabrication in addition to traditional Ti:S laser. However, it is reported that waveguide cannot be fabricated in fused silica by using the fundamental light from Yb-based femtosecond laser[2]. Some groups reported on waveguide fabrication by using second-harmonic beam of such lasers[3], but wavelength conversion using nonlinear process has drawbacks such as destabilization of laser power and beam deformation by walk off.
In this study, we investigated fabrication of low-loss waveguide in fused silica by using the fundamental beam (1030nm) from an Yb solid-state femtosecond laser with a pulse duration of 250 fs. The NA of focusing objective lens was 0.42. The fabricated waveguide was made to have a circular cross-section by shaping laser beam with a slit[4]. We fixed repetition rate to 150 kHz, and identified appropriate scan speed and pulse energy for fabrication of low loss waveguide. Waveguide fabricated with appropriate condition had a propagation loss of 0.2 dB/cm, and this is the first report on optical waveguides in a fused silica fabricated by femto-second laser pulses at a wavelength of 1030nm.
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