Dr. Michael Vergöhl
Head of Dept at Fraunhofer-IST
SPIE Involvement:
Author
Publications (16)

Proceedings Article | 24 June 2024 Presentation + Paper
Stefan Bruns, Philipp Henning, Thomas Melzig, Michael Vergöhl
Proceedings Volume 13020, 1302008 (2024) https://doi.org/10.1117/12.3017448
KEYWORDS: Ellipsometry, Amorphous silicon, Sputter deposition, Transmission electron microscopy, Tantalum, Transmittance, Coating, Silicon, Silica, Plasma

Proceedings Article | 12 July 2023 Open Access Paper
Chris Britze, Michael Vergöhl, Thomas Melzig, Stefan Bruns, Philipp Farr, Hans-Ulrich Kricheldorf, Luis Miguel Gaspar Venancio
Proceedings Volume 12777, 1277765 (2023) https://doi.org/10.1117/12.2691116
KEYWORDS: Wavefront errors, Wavefronts, Sensors, Beam splitters, Wavefront sensors, Reflection, Polarizers, Mirrors, Design and modelling, Point spread functions

Proceedings Article | 5 March 2022 Presentation + Paper
Michael Schneider, Stefan Bruns, Kristin Galonska, Michael Vergöhl, Philipp Farr, Thomas Melzig
Proceedings Volume 12002, 120020C (2022) https://doi.org/10.1117/12.2607764
KEYWORDS: Optical coatings, Sputter deposition, Niobium, Transmittance, Plasma, Refractive index, Process control, Absorption, Spectroscopy, Glasses, Silicon

Proceedings Article | 12 July 2019 Open Access Paper
Michael Vergöhl, Chris Britze, Stefan Bruns, Andreas Pflug, Jennifer Zimara, Bernd Schäfer, Klaus Mann, Volker Kirschner
Proceedings Volume 11180, 1118046 (2019) https://doi.org/10.1117/12.2536069
KEYWORDS: Coating, Wavefronts, Beam splitters, Reflectivity, Monte Carlo methods, Transmittance, Plasma, Sputter deposition, 3D modeling, Tantalum

Proceedings Article | 16 November 2018 Paper
Klaus Mann, Bernd Schäfer, Jennifer Zimara, Michael Vergöhl, Chris Britze, Stefan Bruns, Volker Kirschner
Proceedings Volume 10805, 108052F (2018) https://doi.org/10.1117/12.2502052
KEYWORDS: Wavefronts, Beam splitters, Dielectrics, Optical coatings, Transmittance, Thin film coatings, Reflectivity, Sensors, Chromatic aberrations, Wavefront sensors

Showing 5 of 16 publications
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