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Minsun Cho
at Hanyang Univ
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Publications (2)
Proceedings Article | 31 October 2022 Poster
Alternative EUV mask with platinum-tungsten alloy for high-NA EUV lithography
Proceedings Volume PC12292, PC122920U (2022) https://doi.org/10.1117/12.2641805
KEYWORDS: Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Platinum, Etching, Tungsten, Refractive index, 3D image processing, Thin films, Phase shifts
Proceedings Article | 13 June 2022 Poster
Effect of diffraction phase control for EUV phase shift mask
Dongmin Jeong, Deukgyu Kim, Yunsoo Kim, Minsun Cho, Jinho Ahn
Proceedings Volume PC12051, PC120510V (2022) https://doi.org/10.1117/12.2614362
KEYWORDS: Diffraction, Extreme ultraviolet, Phase shifts
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