Prof. Noboru Yugami Profile

Prof. Noboru Yugami

Professor at Utsunomiya Univ CORE

SPIE Involvement:

Author

Publications (19)

Proceedings Article | 11 December 2012 Paper

Paper

Investigating the effects of laser intensity and pulse duration on 6.7-nm BEUV emission from Gadolinium plasma

Thomas Cummins, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Colm O'Gorman, Padraig Dunne, Emma Sokell, Gerry O'Sullivan, Takeshi Higashiguchi

Proceedings Volume 8678, 86780C (2012) https://doi.org/10.1117/12.2015164

KEYWORDS: Plasma, Picosecond phenomena, Ions, Pulsed laser operation, Gadolinium, Extreme ultraviolet, Nd:YAG lasers, Reflectivity, Time metrology, Extreme ultraviolet lithography

Read Abstract +

Proceedings Article | 23 March 2012 Paper

Paper

Laser-produced plasma UTA emission in 3-7nm spectral region

Takeshi Higashiguchi, Takamitsu Otsuka, Noboru Yugami, Weihua Jiang, Akira Endo, Bowen Li, Colm O'Gorman, Thomas Cummins, Deirdre Kilbane, Padraig Dunne, Gerard O'Sullivan

Proceedings Volume 8322, 83222J (2012) https://doi.org/10.1117/12.916308

KEYWORDS: Plasma, Bismuth, Ions, Extreme ultraviolet, Pulsed laser operation, Picosecond phenomena, Microscopes, Mirrors, X-rays, Tin

Read Abstract +

Proceedings Article | 23 March 2012 Paper

Paper

A 6.7-nm beyond EUV source as a future lithography source

Takamitsu Otsuka, Bowen Li, Colm O'Gorman, Thomas Cummins, Deirdre Kilbane, Takeshi Higashiguchi, Noboru Yugami, Weihua Jiang, Akira Endo, Padraig Dunne, Gerard O'Sullivan

Proceedings Volume 8322, 832214 (2012) https://doi.org/10.1117/12.916351

KEYWORDS: Extreme ultraviolet, Plasmas, Gadolinium, Pulsed laser operation, Ions, Nd:YAG lasers, Lithography, Tin, EUV optics, Carbon dioxide lasers

Read Abstract +

Proceedings Article | 5 October 2011 Paper

Paper

Dynamics of the ultrashort laser pulse in a capillary discharge-preformed argon plasma channel

Shohei Sakai, Jun Miyazawa, Takeshi Higashiguchi, Noboru Yugami, Nadezhda Bobrova, Pavel Sasorov

Proceedings Volume 8140, 814012 (2011) https://doi.org/10.1117/12.892512

KEYWORDS: Plasma, Capillaries, Pulsed laser operation, Argon, Ions, Ionization, Argon ion lasers, Ultrafast phenomena, Waveguides, Photonic integrated circuits

Read Abstract +

Proceedings Article | 28 September 2011 Paper

Paper

Characterization of broadband emission around 40 nm from potassium plasma

Hiromitsu Terauchi, Mami Yamaguchi, Takamitsu Otsuka, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, Rebekah D'Arcy, Padraig Dunne, Gerard O'Sullivan

Proceedings Volume 8139, 81390U (2011) https://doi.org/10.1117/12.892899

KEYWORDS: Plasma, Potassium, Extreme ultraviolet, Ions, Spectroscopy, Pulsed laser operation, Capillaries, Contamination, Light sources, Beam controllers

Read Abstract +

Proceedings Article | 28 September 2011 Paper

Paper

Shorter wavelength EUV source around 6.X nm by rare-earth plasma

Takamitsu Otsuka, Deirdre Kilbane, Thomas Cummins, Colm O'Gorman, Padraig Dunne, Gerry O'Sullivan, Weihua Jiang, Akira Endo, Takeshi Higashiguchi, Noboru Yugami

Proceedings Volume 8139, 81390T (2011) https://doi.org/10.1117/12.892897

KEYWORDS: Plasma, Extreme ultraviolet, Gadolinium, Ions, Terbium, Pulsed laser operation, Nd:YAG lasers, Solids, Mirrors, Carbon dioxide lasers

Read Abstract +

Proceedings Article | 14 September 2011 Paper

Paper

Scaling of laser produced plasma UTA emission down to 3 nm for next generation lithography and short wavelength imaging

Bowen Li, Akira Endo, Takamitsu Otsuka, Colm O'Gorman, Thomas Cummins, Tony Donnelly, Deirdre Kilbane, Weihua Jiang, Takeshi Higashiguchi, Noboru Yugami, Padraig Dunne, Gerry O'Sullivan

Proceedings Volume 8139, 81390P (2011) https://doi.org/10.1117/12.892513

KEYWORDS: Plasma, Extreme ultraviolet, Gadolinium, Ions, Carbon dioxide lasers, Pulsed laser operation, Tin, Lithography, Mirrors, Solids

Read Abstract +

Proceedings Article | 8 September 2011 Paper

Paper

THz wave up-frequency turning by rapidly plasma creation

Akinori Nishida, Masahiro Nakata, Takafumi Oba, Takeshi Higashiguchi, Noboru Yugami, Yasuhiko Sentoku, Ryosuke Kodama

Proceedings Volume 8119, 81190L (2011) https://doi.org/10.1117/12.892900

KEYWORDS: Plasma, Terahertz radiation, Crystals, Ionization, Laser crystals, Pulsed laser operation, Wave propagation, Electromagnetic radiation, Signal detection, Radio propagation

Read Abstract +

Proceedings Article | 8 September 2011 Paper

Paper

Tunable terahertz radiation from an ultrashort-laser-pulse-induced discharge in biased air

Fuminori Suzuki, Hiroaki Anno-Kashiwazaki, Jun Miyazawa, Shohei Ono, Takeshi Higashiguchi, Noboru Yugami, Yasuhiko Sentoku, Ryosuke Kodama, Patric Muggli

Proceedings Volume 8119, 81190M (2011) https://doi.org/10.1117/12.892902

KEYWORDS: Terahertz radiation, Plasma, Pulsed laser operation, Ionization, Ultrafast phenomena, Laser energy, Electrodes, Antennas, Pulsed laser deposition, Nonlinear optics

Read Abstract +

Proceedings Article | 25 August 2010 Paper

Paper

Compact extreme ultraviolet source by use of a discharge-produced potassium plasma for surface morphology application

Hiromitsu Terauchi, Mami Yamaguchi, Keisuke Kikuchi, Takamitsu Otsuka, Takeshi Higashiguchi, Noboru Yugami, Toyohiko Yatagai, Padraig Dunne, Gerry O'Sullivan

Proceedings Volume 7802, 78020T (2010) https://doi.org/10.1117/12.858603

KEYWORDS: Potassium, Extreme ultraviolet, Plasma, Ions, Electrons, Capillaries, Electrodes, Light sources, Spectroscopy, CCD cameras

Read Abstract +

Proceedings Article | 7 May 2009 Paper

Paper

Possibility of high power THz radiation via electromagnetically induced transparency at ion acoustic frequency region in laser-produced dense plasmas

Noboru Yugami, Takeshi Higashiguchi, Ryousuke Kodama

Proceedings Volume 7359, 735911 (2009) https://doi.org/10.1117/12.819890

KEYWORDS: Plasmas, Ions, Electromagnetic radiation, Terahertz radiation, Acoustics, Radio propagation, Wave propagation, Transparency, Refractive index, High power lasers

Read Abstract +

Proceedings Article | 7 May 2009 Paper

Paper

Compression of an ultrashort laser pulse via self-modulation in argon gas

Takeshi Higashiguchi, Masashi Kudo, Noboru Yugami, Eiji Takahashi

Proceedings Volume 7359, 735918 (2009) https://doi.org/10.1117/12.819888

KEYWORDS: Pulsed laser operation, Argon, Laser energy, Protactinium, Ultrafast phenomena, Argon ion lasers, Laser optics, Scanning probe microscopy, Refractive index, Free space optics

Read Abstract +

Proceedings Article | 7 May 2009 Paper

Paper

Plasma diagnostics of a capillary plasma using pulse power

Takeshi Higashiguchi, Hiromitsu Terauchi, Jin-xiang Bai, Takashi Kikuchi, Noboru Yugami, Toyohiko Yatagai

Proceedings Volume 7359, 735917 (2009) https://doi.org/10.1117/12.819887

KEYWORDS: Plasma, Capillaries, Pulsed laser operation, Waveguides, Hydrogen, Laser applications, CCD cameras, Interferometers, Temperature metrology, Photography

Read Abstract +

Proceedings Article | 26 September 2007 Paper

Paper

THz radiation from a DARC source via a laser-produced relativistic ionization front

Nobuo Ohata, Kenta Yaegashi, Kun Li, Takeshi Higashiguchi, Noboru Yugami

Proceedings Volume 6772, 67720V (2007) https://doi.org/10.1117/12.756796

KEYWORDS: Terahertz radiation, Crystals, Ionization, Plasma, Laser beam diagnostics, Capacitors, Laser crystals, Microwave radiation, Pulsed laser operation, Electrodes

Read Abstract +

Proceedings Article | 23 March 2005 Paper

Paper

Enhancement of EUV emission from a liquid microjet target by use of dual laser pulses

Takeshi Higashiguchi, Chirag Rajyaguru, Masato Koga, Keita Kawasaki, Wataru Sasaki, Shoichi Kubodera, Takashi Kikuchi, Noboru Yugami, Shigeo Kawata, Alexander Andreev

Proceedings Volume 5777, (2005) https://doi.org/10.1117/12.611202

KEYWORDS: Extreme ultraviolet, Plasma, Pulsed laser operation, Liquids, Picosecond phenomena, Electronics engineering, Extreme ultraviolet lithography, Mirrors, Laser energy, Oxygen

Read Abstract +

Proceedings Article | 11 January 2000 Paper

Paper

Laser-based electron acceleration to GeV in free space

Yu-kun Ho, J. Wang, Lianghuan Feng, Lei Zhu, Q. Kong, P. Wang, Yasushi Nishida, Noboru Yugami, Hiroaki Ito

Proceedings Volume 3886, (2000) https://doi.org/10.1117/12.375100

KEYWORDS: Laser scattering, Scattering, Compton scattering, Pulsed laser operation, Motion models, Physics, Free space, Laser beam propagation, Laser energy, Solids

Read Abstract +

Proceedings Article | 11 January 2000 Paper

Paper

Proton acceleration by an intense laser supplemented with a static magnetic field

Hiroaki Ito, M. Bakhtiari, Masashi Imai, Noboru Yugami, Yasushi Nishida

Proceedings Volume 3886, (2000) https://doi.org/10.1117/12.375150

KEYWORDS: Magnetism, Plasma, Particles, Pulsed laser operation, Phase velocity, Ions, Laser systems engineering, Sapphire lasers, Carbon dioxide lasers, Wave propagation

Read Abstract +

Proceedings Article | 11 January 2000 Paper

Paper

Measurement of electron density perturbation in laser wakefield

Eiji Takahashi, Keisuke Katsura, Eisuke Miura, Noboru Yugami, Yasushi Nishida, Hiroshi Honda, Kiminori Kondo

Proceedings Volume 3886, (2000) https://doi.org/10.1117/12.375101

KEYWORDS: Phase shifts, Plasma, Pulsed laser operation, Interferometry, Spectroscopy, Laser interferometry, Terahertz radiation, Ultrafast phenomena, CCD cameras, Phase measurement

Read Abstract +

Proceedings Article | 11 January 2000 Paper

Paper

Electron-beam instability in the slab-symmetric dielectric structure and stabilization assisted by pre-ionized plasma

Naotoshi Kirihara, Toshimitsu Nishino, Yasushi Nishida, Hiroaki Ito, Noboru Yugami

Proceedings Volume 3886, (2000) https://doi.org/10.1117/12.375151

KEYWORDS: Waveguides, Electron beams, Plasma, Dielectrics, Magnetism, Particles, Wave propagation, Beam propagation method, Radio propagation, Beam shaping

Read Abstract +

Showing 5 of 19 publications

SIGN IN TO:

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Advertisement

Advertisement