Prof. Robert Plana Profile

Prof. Robert Plana

R&D University Relations Director at Alstom SA

SPIE Involvement:

Author

Publications (18)

Proceedings Article | 7 December 2010 Paper

3D heterogeneous integration of wireless communicating nano-sensors on flexible substrate

M. M. Jatlaoui, D. Dragomirescu, S. Charlot, P. Pons, H. Aubert, R. Plana

Proceedings Volume 7821, 78211E (2010) https://doi.org/10.1117/12.882308

KEYWORDS: Antennas, Transceivers, Wireless communications, Sensors, Flexible circuits, Nanolithography, Silicon, Coating, Nanotechnology, Nanosensors

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Proceedings Article | 4 December 2010 Paper

MEMS switch for 60 GHz band

D. Vasilache, G. Constantinidis, M. Dragoman, A. Takacs, F. Vladoianu, T. Kostopoulos, G. Boldeiu, V. Moagar, Catalin Tibeica, L. Bary, R. Plana

Proceedings Volume 7821, 78210O (2010) https://doi.org/10.1117/12.881775

KEYWORDS: Switches, Manufacturing, Microelectromechanical systems, Gold, Optics manufacturing, Extremely high frequency, Switching, Semiconducting wafers, Design for manufacturability, Computer simulations

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Proceedings Article | 4 December 2010 Paper

60GHz wireless nano-sensors network for structure health monitoring as enabler for safer, greener aircrafts

D. Dragomirescu, M. Kraemer, M. Jatlaoui, P. Pons, H. Aubert, A. Thain, R. Plana

Proceedings Volume 7821, 782105 (2010) https://doi.org/10.1117/12.882393

KEYWORDS: Wireless communications, Sensors, Sensor networks, Transceivers, Structural health monitoring, Nanotechnology, Antennas, RF communications, Network architectures, Telecommunications

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SPIE Journal Paper | 1 October 2010

Characterization of gold/gold, gold/ruthenium, and ruthenium/ruthenium ohmic contacts in MEMS switches improved by a novel methodology

Adrien Broué, Jérémie Dhennin, Frédéric Courtade, Christel Dieppedal, Patrick Pons, Xavier Lafontan, Robert Plana

JM3, Vol. 9, Issue 04, 041102, (October 2010) https://doi.org/10.1117/12.10.1117/1.3504663

KEYWORDS: Resistance, Switches, Microelectromechanical systems, Interfaces, Gold, Physics, Ruthenium, Metals, Reliability

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Proceedings Article | 5 February 2010 Paper

Characterization of Au/Au, Au/Ru, and Ru/Ru ohmic contacts in MEMS switches improved by a novel methodology

Adrien Broue, Jérémie Dhennin, Frédéric Courtade, Christel Dieppedale, Patrick Pons, Xavier Lafontan, Robert Plana

Proceedings Volume 7592, 75920A (2010) https://doi.org/10.1117/12.840979

KEYWORDS: Resistance, Switches, Microelectromechanical systems, Gold, Interfaces, Ruthenium, Physics, Metals, Reliability, Virtual colonoscopy

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Proceedings Article | 7 January 2009 Paper

A new approach to RF MEMS shunt switch modeling from K-band up to W-band

V. Puyal, D. Dragomirescu, R. Plana

Proceedings Volume 7297, 729720 (2009) https://doi.org/10.1117/12.823684

KEYWORDS: Microelectromechanical systems, Switches, Bridges, K band, Inductance, Systems modeling, Capacitance, Phase shifts, Radio frequency circuits, Electrodes

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Proceedings Article | 15 May 2007 Paper

Temperature stress impact on power RF MEMS switches

Chloé Bordas, Katia Grenier, David Dubuc, Mathieu Paillard, Jean-Louis Cazaux, Robert Plana

Proceedings Volume 6589, 65890V (2007) https://doi.org/10.1117/12.722010

KEYWORDS: Switches, Microelectromechanical systems, Bridges, Temperature metrology, Electrodes, Silicon, Gold, Dielectrics, Telecommunications, Failure analysis

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Proceedings Article | 20 December 2006 Paper

Millimeter-wave monolithic integrated receivers based on GaAs micromachining

G. Konstantinidis, D. Neculoiu, A. Stavinidris, Z. Chatzopoulos, A. Muller, K. Tsagaraki, D. Vasilache, I. Petrini, C. Buiculescu, L. Bary, R. Plana

Proceedings Volume 6415, 64150C (2006) https://doi.org/10.1117/12.695166

KEYWORDS: Receivers, Gallium arsenide, Antennas, Diodes, Manufacturing, Etching, Micromachining, Photomasks, Extremely high frequency, Semiconducting wafers

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Proceedings Article | 1 July 2005 Open Access

MEMS above IC technology applied to a compact RF module

K. Grenier, L. Mazenq, D. Dubuc, E. Ojefors, P. Lindberg, A. Rydberg, J. Berntgen, W.-J. Rabe, E. Sonmez, P. Abele, H. Schumacher, R. Plana

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.609383

KEYWORDS: Silicon, Transistors, Antennas, Semiconducting wafers, Etching, Deep reactive ion etching, Micromachining, Polymers, Photoresist materials, Dielectrics

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Proceedings Article | 1 July 2005 Paper

Efficient topology and design methodology for RF MEMS switches

B. Ducarouge, D. Dubuc, S. Melle, K. Grenier, L. Mazenq, L. Bary, R. Plana

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.609396

KEYWORDS: Switches, Microelectromechanical systems, Bridges, Electrodes, Silicon, Microwave radiation, Electromechanical design, Electromagnetism, Capacitance, Device simulation

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Proceedings Article | 16 August 2004 Paper

MEMS-based redundancy ring for low-noise millimeter-wave front-end

Patrick Pons, David Dubuc, Federic Flourens, Mohammad Saddaoui, Samuel Melle, Alex Tackacs, Junwu Tao, Herve Aubert, Ali Boukabache, T. Paillot, Pierre Blondy, Olivier Vendier, Katia Grenier, Robert Plana

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.548751

KEYWORDS: Microelectromechanical systems, Dielectrics, Switches, Reliability, Waveguides, Microsystems, Microwave radiation, Silicon, Bridges, Gold

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This paper reports on the investigation of the potentialities of the MEMS technologies to develop innovative microsystem for millimetre wave communication essentially for space applications. One main issue deals with the robustness and the reliability of the equipment as it may difficult to replace or to repair them when a satellite has been launched. One solution deals with the development of redundancy rings that are making the front end more robust. Usually, the architecture of such system involves waveguide or diode technologies, which present severe limitations in term of weight, volume and insertion loss. The concept considered in this paper is to replace some key elements of such system by MEMS based devices (Micromachined transmission lines, switches) in order to optimize both the weight and the microwave performance of the module. A specific technological process has been developed consisting in the fabrication of the devices on a dielectric membrane on air suspended in order to improve the insertion loss and the isolation. To prove the concept, building blocks have been already fabricated and measured (i.e micromachined transmission and filter featuring very low insertion loss, single pole double through circuits to address the appropriate path of the redundancy ring). We have to outline that MEMS technology have allowed a simplification of the architecture and a different system partitioning which gives more degree of freedom for the system designer. Furthermore, it has been conducted an exhaustive reliability study in order to identify the failure mechanisms. Again, from the results obtained, we have proposed an original topology for the SPDT circuit that takes into account the reliability behaviour of the MEMS devices and that allow to prevent most of the failure mechanisms reported so far (mainly related to the dielectric charging effect). Finally, the active device (millimetre wave low noise amplifier) will be reported on the MEMS based chip using flip chip technology to integrate the Microsystem.

Proceedings Article | 25 May 2004 Paper

Low frequency noise behavior in GaN HEMT’s on silicon substrate

Laurent Bary, Elena Angeli, Abdelali Rennane, Jean-Guy Tartarin, Jacques Graffeuil, Robert Plana, Sylvain Delage, Jean-Claude de Jaegger, Yvon Cordier

Proceedings Volume 5470, (2004) https://doi.org/10.1117/12.547046

KEYWORDS: Field effect transistors, Amplifiers, Gallium nitride, Silicon, Phase measurement, Transistors, Resistance, Oscillators, Microwave radiation, Switches

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Proceedings Article | 25 May 2004 Paper

Using low frequency noise characterization of AlGaN/GaN HEMT as a tool for technology assessment and failure prediction

Jean-Guy Tartarin, Abdelali Rennane, Elena Angeli, Laurent Bary, Jean-Claude De Jaeger, Sylvain Delage, Robert Plana, Jacques Graffeuil

Proceedings Volume 5470, (2004) https://doi.org/10.1117/12.547022

KEYWORDS: Field effect transistors, Sapphire, Silicon, Gallium nitride, Quantum wells, Patterned sapphire substrate, Transistors, Resistors, Silicon carbide, Tin

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Proceedings Article | 24 April 2003 Paper

Polymers in RF and millimeter-wave applications

Katia Grenier, Victor Lubecke, Fouad Bouchriha, Laurent Rabbia, David Dubuc, Patrick Pons, Robert Plana

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.499052

KEYWORDS: Polymers, Silicon, Dielectrics, Signal attenuation, Micromachining, Etching, Oxides, Microelectromechanical systems, Semiconducting wafers, Microwave radiation

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Proceedings Article | 1 October 2001 Paper

MEMS antennas for millimeter-wave applications

Dan Neculoiu, Patrick Pons, Robert Plana, Pierre Blondy, Alexandru Mueller, Dan Vasilache

Proceedings Volume 4559, (2001) https://doi.org/10.1117/12.443020

KEYWORDS: Antennas, Dielectrics, Silicon, Extremely high frequency, Electromagnetic simulation, Semiconducting wafers, Microelectromechanical systems, Microwave radiation, Gold, Circuit switching

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Proceedings Article | 30 April 2001 Paper

Silicon MEM technology for millimeter-wave applications

Katia Grenier, D. Dubuc, Patrick Pons, Robert Plana, L. Rabbia, T. Parra, Jacques Graffeuil

Proceedings Volume 4407, (2001) https://doi.org/10.1117/12.425307

KEYWORDS: Bridges, Microelectromechanical systems, Switches, Silicon, Photoresist materials, Molecular bridges, Micromachining, Capacitors, Dielectrics, Semiconducting wafers

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Proceedings Article | 10 April 2000 Paper

Silicon micro-electro-mechanical systems for millimeter-wave applications

Katia Grenier, Patrick Pons, T. Parra, Robert Plana, Jacques Graffeuil

Proceedings Volume 4019, (2000) https://doi.org/10.1117/12.382269

KEYWORDS: Bridges, Switches, Microelectromechanical systems, Micromachining, Silicon, Microwave radiation, Photoresist materials, Molecular bridges, Gold, Electromagnetism

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Proceedings Article | 13 November 1998 Paper

Si micromachining and whispering-gallery dielectric resonator modes: an original issue for high-Q coplanar millimeter-wave cavity

Bertrand Guillon, D. Cros, T. Parra, Patrick Pons, J. Lalaurie, Robert Plana, Jacques Graffeuil

Proceedings Volume 3465, (1998) https://doi.org/10.1117/12.331173

KEYWORDS: Silicon, Resonators, Dielectrics, Extremely high frequency, Microwave radiation, Micromachining, Gold, Wave propagation, Oxides, Radio propagation

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Showing 5 of 18 publications

Conference Committee Involvement (2)

Oxide-based Materials and Devices V

2 February 2014 | San Francisco, California, United States

MEMS, MOEMS, and Micromachining

29 April 2004 | Strasbourg, France

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