Combining reflectometry and hyperspectral imaging allows mapping of thin film thickness. Therefore, layer thickness is calculated by comparing a dataset of simulated spectra with the measured data. Utilizing the maximum frame rate of the hyperspectral imager, the pixel wise spectra comparing procedure cannot be performed using a standard computer due to the processing load. In this work, a method using neural networks for calculating layer thickness is presented. By the use of the nonlinear equation as result of a trained neural network, thickness data can be determined with a measurement rate matching the maximum frame rate of the hyperspectral imager.
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