We demonstrated nonvolatile, electrically programmable, phase-only modulation of free-space infrared radiation in transmission based on low-loss phase change materials (PCMs) Sb2Se3. By coupling ultra-thin PCM to a high quality-factor (Q~406) diatomic metasurface, we demonstrated a phase-only modulation of ~0.25π (~0.2π) in simulation (experiment), ten times larger than without using the metasurface. The metasurface is robust against reversible switching over 1,000 times. Finally, we showed independent control of 17 meta-molecules, achieving ten deterministic resonance levels in a tunable notch filter with a maximum spectral shift of ~8nm. The independent control also allowed us to achieve varifocal lensing. This work paves way to a nonvolatile phase-only SLM.
Programmability is demanding in integrated photonics, while a suitable photonic platform is still lacking. It should have no static power, easy tuning knobs, high endurance, and many operation levels. We report a wide-bandgap PCM antimony sulfide (Sb2S3)-clad silicon photonic platform, based on which essential building blocks for programmable photonics are demonstrated, including micro-ring resonators, Mach-Zehnder Interferometers, and directional couplers. The fabricated devices simultaneously achieved low loss (<1.0 dB), high extinction ratio (>10 dB), high cyclability (>1,600 switching events), and 5-bit (32 operation levels) operation.
We demonstrate a nonvolatile electrically programmable phase-change silicon photonic switch and phase shifter leveraging a monolayer graphene heater with record-high programming energy efficiency (8.7±1.4 aJ/nm3) and endurance (> 1,000 cycles).
Phase-change materials (PCMs) integrated photonics are generating new paradigms, thanks to their zero static energy consumption, capability of switching reversibly, and drastic optical property contrast. However, electrically switching PCMs is inherently stochastic, hindering reliable multi-level or quasi-continuous operations. Here we propose that reliable quasi-continuous operation can be achieved in GST optical switches, where several GST patches are controlled in a binary fashion by interleaved PIN-diode doped silicon microheaters. We further experimentally demonstrate that the idea works in a tunable attenuator.
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