Dr. Sam-Jong Choi Profile

Dr. Sam-Jong Choi

at SAMSUNG Electronics Co Ltd

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Author

Publications (2)

SPIE Journal Paper | 31 December 2024

Underlayer material design for extreme ultraviolet negative-tone development photolithography process by controlling photoresist-underlayer intermixing

Seung Won Han, Eunkyoung Byun, Sukmin Kim, Hong Joon Lee, Jingoo Yoon, Yun Ho Kim, Sam-Jong Choi

JM3, Vol. 23, Issue 04, 044602, (December 2024) https://doi.org/10.1117/12.10.1117/1.JMM.23.4.044602

KEYWORDS: Extreme ultraviolet, Polymers, Photoacid generators, Design, Coating thickness, Extreme ultraviolet lithography, Photoresist developing, Diffusion, Semiconducting wafers, Lithography

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Proceedings Article | 9 April 2024 Poster + Paper

Prediction of lithographic performance upon the adjustment of EUV photoresist components by advanced contrast curve analysis

Eunkyoung Byun, Sukmin Kim, Seungwon Han, Jaehui Choe, Seongji Kwon, Junghoon Lee, Sam-Jong Choi

Proceedings Volume 12957, 129571O (2024) https://doi.org/10.1117/12.3009950

KEYWORDS: Photoresist materials, Photoacid generators, Film thickness, Photoresist developing, Extreme ultraviolet lithography, Image processing, Lithography, Nanoimprint lithography, Coating thickness, Advanced patterning

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