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Samuel K. Davis
at Intel Corp
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Publications (1)
Proceedings Article | 10 April 2024 Poster + Paper
Sampling plan optimization and process simulation for CD control
Ulrich Denker, Philip Groeger, Robin Zech, Christoph Ehrlich, Telly Koffas, Samuel Davis
Proceedings Volume 12955, 129552I (2024) https://doi.org/10.1117/12.3010104
KEYWORDS: Semiconducting wafers, Data modeling, Mathematical optimization, Critical dimension metrology, Nonuniform sampling, Computer simulations, Statistical modeling, High volume manufacturing, Zernike polynomials, Overfitting
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