This paper reports a new water-immersible single-axis scanning mirror using hybrid polymer and elastomer hinges to achieve both high scanning resonance frequencies and large tilting angles for high-speed and wide-field 3D ultrasound imaging. To demonstrate the concept, a prototype scanning mirror is designed, fabricated, and characterized. The fast- and slow-scanning were achieved by integrating stiff BoPET (biaxially oriented polyethylene terephthalate) and soft elastomer PDMS (Polydimethylsiloxane) hinges, respectively. The testing results have shown a resonance frequency of 270 Hz for the BoPET hinges and a resonance frequency of 10 Hz for the PDMS hinges when the scanning mirror was immersed in water. 3D ultrasound imaging is demonstrated by combining the fast- and slow-scanning together to provide both an augmented field of view (FoV) and high local imaging volume rate.
This paper reports a new two-axis water-immersible micro scanning mirror (WIMSM) using torsional and bending BoPET (biaxially-oriented polyethylene terephthalate) hinges. A micromachining-based fabrication process is developed to enable high patterning resolution and alignment accuracy and to reduce the amount of manual assembly. With a torsional hinge, the fast axis has a resonance frequency of ~300 Hz in air and ~200 Hz in water. With a bending hinge, the slow axis has a resonance frequency of 60~70 Hz in air and 20~40 Hz in water. 2D B-scan and 3D volumetric ultrasound microscopy are demonstrated by using the hybrid-hinge scanning mirror. The ability of scanning the slow axis at DC or very low frequencies allows a dense raster scanning pattern to be formed for improving both the imaging resolution and field of view.
We report a two-axis water-immersible microscanning mirror using torsional and bending biaxially oriented polyethylene terephthalate hinges. Two different designs based on a four- or single-coil electromagnetic actuator are investigated. A micromachining-based fabrication process is developed to enable high patterning resolution and alignment accuracy and to reduce the amount of manual assembly. With a torsional hinge, the fast axis has a resonance frequency of 300 to 500 Hz in air and 200 to 400 Hz in water. With a bending hinge, the slow axis has a resonance frequency of 60 to 70 Hz in air and 20 to 40 Hz in water. 2D B-scan and 3D volumetric ultrasound microscopy are demonstrated using the hybrid-hinge scanning mirror. The ability of scanning the slow axis at DC or very low frequencies allows a dense raster scanning pattern to be formed for improving both the imaging resolution and field of view.
This paper reports a new micromachined two-axis water-immersible micro scanning mirror using BoPET (biaxiallyoriented polyethylene terephthalate) hinges. A new fabrication process based on lithography, wafer-bonding, and reactive ion etching on a hybrid silicon-polymer substrate was developed to enable high-resolution patterning, miniaturization and also batch fabrication capability. For demonstration, a prototype scanning mirror was designed, fabricated and tested. Its overall size was reduced to 5×5×5 mm3, which is comparable to that of a typical siliconbased micro scanning mirror. The testing results show good raster scanning performance. This approach could enable the miniaturization and batch fabrication of water-immersible scanning mirrors for different scanning optical and acoustic imaging applications in liquid environments.
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