Ms. Siyu Feng Profile

Siyu Feng

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Publications (1)

Proceedings Article | 10 December 2024 Paper

Application of path planning in vector scanning electron beam lithography

Kangpeng Huang, Wenhao Wang, Jiacong Zhao, Siyu Feng, Zhaoyang Lan, Zhensheng Zhang, Xuefeng Song, Dapeng Yu

Proceedings Volume 13423, 134230J (2024) https://doi.org/10.1117/12.3052898

KEYWORDS: Electron beam lithography, Electron beams, Quantum experiments, Beam path, Signal generators, Visualization, Signal processing, Raster graphics, Quantum technologies, Quantum processes

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