Prof. Tamar Segal-Peretz Profile

Prof. Tamar Segal-Peretz

at Technion - Israel Institute of Technology

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Author

Publications (5)

Proceedings Article | 13 June 2022 Presentation

Sequential infiltration synthesis for precise and three-dimensional nanofabrication

Rotem Azoulay, Inbal Weisbord, Maya Barzilay, Tamar Segal-Peretz

Proceedings Volume PC12054, PC120540C (2022) https://doi.org/10.1117/12.2618249

KEYWORDS: Polymers, Nanofabrication, Atomic layer deposition, Oxides, Optical lithography, Metals, X-rays, X-ray microscopy, Transmission electron microscopy, Polymer chemistry

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SPIE Journal Paper | 27 January 2022

Development and evaluation of three-dimensional metrology of nanopatterns using electron microscopy

Neta Shomrat, Konstantin Chirko, Inbal Weisbord, Yan Avniel, Sergey Khristo, David Nessim, Alon Litman, Tamar Segal-Peretz

JM3, Vol. 21, Issue 02, 021202, (January 2022) https://doi.org/10.1117/12.10.1117/1.JMM.21.2.021202

KEYWORDS: 3D metrology, Scanning electron microscopy, Scanning transmission electron microscopy, Tomography, Line edge roughness, Sensors, 3D image processing, Metrology, Calibration, Transmission electron microscopy

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SPIE Journal Paper | 22 August 2018 Open Access

Studying the effects of chemistry and geometry on DSA hole-shrink process in three-dimensions

Chun Zhou, Tsuyoshi Kurosawa, Takahiro Dazai, Jan Doise, Jiaxing Ren, Cody Bezik, Tamar Segal-Peretz, Roel Gronheid, Paulina Rincon-Delgadillo, Akiyoshi Yamazaki, Juan de Pablo, Paul Nealey

JM3, Vol. 17, Issue 03, 031203, (August 2018) https://doi.org/10.1117/12.10.1117/1.JMM.17.3.031203

KEYWORDS: Directed self assembly, Polymethylmethacrylate, Picosecond phenomena, Tomography, System on a chip, Chemistry, Scanning transmission electron microscopy, Transmission electron microscopy, Semiconducting wafers, 3D image processing

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Proceedings Article | 19 March 2018 Paper

Studying the effects of chemistry and geometry on DSA hole-shrink process in three dimensions

Chun Zhou, Tsuyoshi Kurosawa, Takahiro Dazai, Jan Doise, Jiaxing Ren, Cody Bezik, Tamar Segal-Peretz, Akiyoshi Yamazaki, Roel Gronheid, Paulina Rincon-Delgadillo, Juan de Pablo, Paul Nealey

Proceedings Volume 10584, 105840K (2018) https://doi.org/10.1117/12.2297461

KEYWORDS: Polymethylmethacrylate, Picosecond phenomena, Directed self assembly, Tomography, Transmission electron microscopy, System on a chip, Chemistry, Semiconducting wafers, 3D metrology, Scanning transmission electron microscopy

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Proceedings Article | 19 March 2015 Paper

Metrology of DSA process using TEM tomography

Tamar Segal-Peretz, Jonathan Winterstein, Jiaxing Ren, Mahua Biswas, J. Alexander Liddle, Jeffery Elam, Leonidas Ocola, Ralu N. Divan, Nestor Zaluzec, Paul Nealey

Proceedings Volume 9424, 94240U (2015) https://doi.org/10.1117/12.2085577

KEYWORDS: Tomography, Nanostructures, Transmission electron microscopy, Scanning transmission electron microscopy, Polymers, Polymethylmethacrylate, Etching, Metrology, Picosecond phenomena, Directed self assembly

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