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Tomoyo Seko
at Meijo Univ
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Publications (1)
Proceedings Article | 17 February 2009 Paper
Fabrication technique for moth-eye structure using low-energy electron-beam projection lithography for high-performance blue-light-emitting diode on SiC substrate
T. Seko, S. Mabuchi, F. Teramae, A. Suzuki, Y. Kaneko, R. Kawai, S. Kamiyama, M. Iwaya, H. Amano, I. Akasaki
Proceedings Volume 7216, 721628 (2009) https://doi.org/10.1117/12.811348
KEYWORDS: Antireflective coatings, Light emitting diodes, Silicon carbide, Fabrication, Projection lithography, Blue light emitting diodes, Electron beam lithography, Photomasks, Transparency, Charged-particle lithography
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