Mr. Xiaofei Wu Profile

Xiaofei Wu

PhD Candidate at Univ of Hong Kong

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Publications (2)

Proceedings Article | 15 March 2016 Paper

Incorporating photomask shape uncertainty in computational lithography

Xiaofei Wu, Shiyuan Liu, Andreas Erdmann, Edmund Lam

Proceedings Volume 9780, 97800Q (2016) https://doi.org/10.1117/12.2220278

KEYWORDS: Photomasks, Electroluminescent displays, Critical dimension metrology, Lithography, Error analysis, Computational lithography, Source mask optimization, Optimization (mathematics), Electron beam lithography, Stochastic processes

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Proceedings Article | 13 March 2012 Paper

In-situ measurement of lens aberrations in lithographic tools using CTC-based quadratic aberration model

Xiaofei Wu, Shiyuan Liu, Shuang Xu, Xinjiang Zhou, Wei Liu

Proceedings Volume 8326, 832629 (2012) https://doi.org/10.1117/12.916190

KEYWORDS: Lithography, Photomasks, Algorithm development, Imaging systems, Optical lithography, Fourier transforms, Genetic algorithms, Metrology, Computer simulations, Image storage

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