White Light Interferometry (WLI) is a widely used technique for surface recovery. However, it is extremely sensitive to various external disturbances, increasing the uncertainty on measurement results. In this paper, a time-domain guided filtering-based surface recovery algorithm is proposed for WLI. The reference signal is firstly simulated according to the spectral map of illuminator employed in the system. The correlation between the actual correlogram and the simulated one is then analyzed through the generalized cubic correlation delay estimation method. The corrected correlogram is obtained as a local linear transformation of the reference one that has been shifted, where the linear coefficients are estimated using least squares analysis. The surface height is then retrieved based on mapping relationship between the phase and frequency. The capability of the proposed method on noise suppression is investigated through simulation under different levels of additive noise. In the experiment, a step height standard (VLSI,181.0nm±2.1nm) is employed, which verifies the performance of the proposed method on measurement accuracy and reliability.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.