One prototype carbon fiber-reinforced plastics (CFRP) panel for 5-m Dome A Terahertz Explorer antenna is replicated successfully in meeting the surface accuracy requirement of less than 10  μm rms by using resin-rich layer technology. By considering the unconventional thermal deformation behavior of a composite structure, a finite-element model (FEM) is produced to predict the thermal deformation behavior of the panel at low temperature. Effects of structural parameters on thermal deformation behavior of the panel are discussed and they are used in the design and in the structural optimization for minimizing surface thermal deformation error at low temperature. An experimental method based on high precision photogrammetry is used to measure the thermal deformation error of the prototype panel. The method has been used for updating the properties of the FEM so that the FEM becomes even more accurate. A prototype panel with high surface accuracy and high thermal stability has been manufactured recently based on the design parameters given by the updated FEM. Plans for improvements in structure design and molding process are also provided at the end of the paper.