Yi Gan
at Wuhan Rrch Inst Post & Telecom
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 31 January 2005 Paper
Yi Gan, Jun Zhang, Shan Jiang, Xiaodong Huang, Ning Zhou, Ligang Deng
Proceedings Volume 5624, (2005) https://doi.org/10.1117/12.575729
KEYWORDS: Etching, Chlorine, Photomasks, Scanning electron microscopy, Optoelectronic devices, Dry etching, Ions, Vertical cavity surface emitting lasers, Reactive ion etching, Anisotropic etching

Proceedings Article | 12 May 2004 Paper
Jun Zhang, Xiaodong Huang, Jin Chang, Yingjun Liu, Yi Gan, Linsong Li, Dingli Wang, Tao Liu, Shan Jiang, Ligang Deng
Proceedings Volume 5280, (2004) https://doi.org/10.1117/12.523504
KEYWORDS: Dry etching, Etching, Plasma, Reactive ion etching, Antireflective coatings, Chlorine, Metalorganic chemical vapor deposition, Ions, Plasma etching, Wet etching

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top