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Yong Yuan
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Publications (1)
Proceedings Article | 5 August 2009 Paper
Novel 0.9 THz integrated horn antenna based on MEMS technology
Yong Yuan, Yong Liu, Xin Lv
Proceedings Volume 7385, 738529 (2009) https://doi.org/10.1117/12.835732
KEYWORDS: Antennas, Microelectromechanical systems, Silicon, Wet etching, Terahertz radiation, Thin films, Semiconducting wafers, Dry etching, Manufacturing, Finite element methods
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