The micro-grooving technology/micro-ruling technology is a special and efficient manufacturing technology and generally used to machine the cylindrical surface and micro grooved structures array. This paper investigates the fabrication of different types of micro structures by ruling. Experiment is conducted to machine a multi-layer micropillar array with a sharp diamond cutting tool by micro-grooving. Experimental results show that micro-grooving technology is feasible for the machining of multi-layer micropillar array with submicrometer form accuracy.
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