Kumar Shubham
at IIT(BHU)
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 January 2013 Paper
Proceedings Volume 8760, 876007 (2013) https://doi.org/10.1117/12.2009612
KEYWORDS: Dielectrics, Thin films, Oxides, Annealing, Capacitance, Interfaces, Silicon, Metals, Deposition processes, Titanium dioxide

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