Mr. Ohhyung Kwon Profile

Ohhyung Kwon

at Myongji Univ

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Publications (1)

Proceedings Article | 28 March 2017 Presentation + Paper

Anamorphic approach for developing hi-efficiency illumination system to inspect defects on semiconductor wafers

Woojun Han, Sunseok Yang, Ohhyung Kwon, Seungyong Chu, Seungchul Oh, Woosung Jung, Jaisoon Kim

Proceedings Volume 10145, 1014517 (2017) https://doi.org/10.1117/12.2258162

KEYWORDS: Inspection, Near field optics, Light sources, Defect inspection, Beam shaping, Semiconducting wafers, Near field, Lithium, Ultraviolet radiation, Prisms, Optical inspection, Optical design, Light emitting diodes

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