Mr. Qingbin Meng Profile

Qingbin Meng

at Academy of Opto-Electronics CAS

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Publications (3)

Proceedings Article | 15 March 2016 Paper

Confocal position alignment in high-precision wavefront error metrology using Shack-Hartmann wavefront sensor

Jiani Su, Zengxiong Lu, Yuejing Qi, Guangyi Liu, Qingbin Meng

Proceedings Volume 9780, 97801N (2016) https://doi.org/10.1117/12.2218506

KEYWORDS: Collimators, Wavefront sensors, Inspection, Optical alignment, Lithography, Confocal microscopy, Wavefronts, Metrology, Wavefront reconstruction, Zernike polynomials, Monochromatic aberrations, Sensors

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Proceedings Article | 7 August 2015 Paper

Analysis of the pinhole array illumination source for high precision wavefront error metrology

Zengxiong Lu, Yuejing Qi, Qingbin Meng, Jiani Su, Guangyi Liu

Proceedings Volume 9623, 962302 (2015) https://doi.org/10.1117/12.2191100

KEYWORDS: Wavefronts, Spherical lenses, Metrology, Diffraction, Collimators, Error analysis, Wavefront sensors, Optical testing, Aluminum, Gold

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Proceedings Article | 5 August 2015 Paper

Effect of ambient temperature on the measurement accuracy of Shack-Hartmann wavefront sensor

Qingbin Meng, Yuejing Qi, Zengxiong Lu, Jiani Su

Proceedings Volume 9621, 96210H (2015) https://doi.org/10.1117/12.2193109

KEYWORDS: Wavefronts, Temperature metrology, Wavefront sensors, Wavefront reconstruction, Charge-coupled devices, Zemax, Sensors, Error analysis, Optical fibers, Optical testing

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