Low-loss hollow-core waveguide using high-contrast sub-wavelength grating

James Ferrara; Weijian Yang; Anthony Yeh; Karen Grutter; Christopher Chase; Vadim Karagodsky; Devang Parekh; Yang Yue; Alan E. Willner; Ming C. Wu; Connie J. Chang-Hasnain

doi:10.1117/12.909773

23 February 2012 Low-loss hollow-core waveguide using high-contrast sub-wavelength grating

James Ferrara, Weijian Yang, Anthony Yeh, Karen Grutter, Christopher Chase, Vadim Karagodsky, Devang Parekh, Yang Yue, Alan E. Willner, Ming C. Wu, Connie J. Chang-Hasnain

Author Affiliations +

Proceedings Volume 8270, High Contrast Metastructures; 82700I (2012) https://doi.org/10.1117/12.909773
Event: SPIE OPTO, 2012, San Francisco, California, United States

Abstract

We present a novel form of hollow-core waveguiding that enables chip-scale integration. Light propagates in air along a zig-zag path between very highly-reflective Si metastructures comprised of a single layer of sub-wavelength high-contrast gratings (HCGs) without the aid of sidewalls. Top and bottom subwavelength HCGs separated by 9um of air and with periodicity perpendicular to the propagation of light reflect light at shallow angles with extremely low loss. The HCGs are patterned on SOI wafers with 340 nm-thick Si device layers engraved in a single etch step, and have been measured to have a 0.37 dB/cm propagation loss. Our work demonstrates the light-guiding properties of HCG hollow-core waveguides with a novel form of lateral beam confinement that uses subtle reflection phase changes between core and cladding HCG regions capable of bending light around 30 mm radius-of-curvature tracks.

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James Ferrara, Weijian Yang, Anthony Yeh, Karen Grutter, Christopher Chase, Vadim Karagodsky, Devang Parekh, Yang Yue, Alan E. Willner, Ming C. Wu, and Connie J. Chang-Hasnain "Low-loss hollow-core waveguide using high-contrast sub-wavelength grating", Proc. SPIE 8270, High Contrast Metastructures, 82700I (23 February 2012); https://doi.org/10.1117/12.909773

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KEYWORDS

Waveguides

Silicon

Cladding

Light wave propagation

Wave propagation

Semiconducting wafers

Refractive index

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