PROCEEDINGS VOLUME 5458
PHOTONICS EUROPE | 26-30 APRIL 2004
Optical Micro- and Nanometrology in Manufacturing Technology
Editor Affiliations +
PHOTONICS EUROPE
26-30 April 2004
Strasbourg, France
MEMS Characterization I
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.546646
Sylvain Petitgrand, Alain Bosseboeuf, Matthieu Guirardel
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.545509
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.545574
Petra Aswendt, Thierry Dean
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.547720
MOEMS Devices and Materials Characterization
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.545663
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.545458
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.545553
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.544955
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.544171
Topography and Shape Measurement
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.546018
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.545724
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.545582
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.546268
Novelty Techniques
Gopalkrishna M. Hegde, Eluska Sukia, Lim Choo Min, Anand Krishna Asundi
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.544179
Rabah Mokdad, Idriss El-Hafidi, Patrick Meyrueis
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.544098
Andrei Sabac, Christophe Gorecki, Michal Jozwik, Thierry Dean, Alain Jacobelli
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.546299
Chien-Ming Wu, Ming-Chi Pao
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.545327
Near-Field Characterization and Nanostructures
Sudhiranjan Tripathy, Soo Jin Chua
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.545352
Lionel Aigouy, Michel Mortier, Yannick De Wilde, Jacques Gierak, Eric Bourhis
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.544106
Youssef Haidar, Frederique de Fornel, Chouki Zerouki, Patrick Pinot
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.545692
Christophe Gorecki, Dominique Heinis
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.546003
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.545793
MEMS Characterization II
Valerio Annovazzi-Lodi, Mauro Benedetti, Sabina Merlo, Michele Norgia, Benedetto Vigna, Simone Sassolini
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.546283
Krzysztof Patorski, Zbigniew Sienicki, Michal Pawlowski, Adam R. Styk, Agata Józwicka
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.545450
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.545254
MEMS Characterization III
Giuseppe Coppola, Sergio De Nicola, Pietro Ferraro, Andrea Finizio, Piera Maccagnani, Giovanni Pierattini
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.546016
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.546600
John Hedley, Jim S. Burdess, Alun J. Harris, Barry J. Gallacher, Calum J. McNeil, Peter J. Cumpson, Stefan Enderling
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.545596
MOEMS Devices and Materials Characterization
Marat S. Soskin, Vladimir G. Denisenko, Roman I. Egorov
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.544681
Poster Session
Gopalkrishna M. Hegde, E. Purnomo, E. L. Ang, Andrew Thurairaja Sabaratnam, Anand Krishna Asundi
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.545210
Bruno Serio, Jean-Jacques Hunsinger, Bernard Cretin
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.545586
Peggy Gonzales, Robert Bernath, Joshua Duncan, Ty Olmstead, Martin Richardson
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.545927
Ondrej Cip, Frantisek Petru, Vit Matousek, Josef Lazar
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.545929
Gregory Wurtz, Dominique Burget, Christiane Carre
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.545655
Proceedings Volume Optical Micro- and Nanometrology in Manufacturing Technology, (2004) https://doi.org/10.1117/12.554287
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