Laser Scatterometer

Yi-Sheng Chen; Wen-Gui Wang

doi:10.1117/12.948104

5 April 1989 Laser Scatterometer

Yi-Sheng Chen, Wen-Gui Wang

Author Affiliations +

Proceedings Volume 0967, Stray Light and Contamination in Optical Systems; (1989) https://doi.org/10.1117/12.948104
Event: 32nd Annual International Technical Symposium on Optical and Optoelectronic Applied Science and Engineering, 1988, San Diego, CA, United States

Abstract

We research and manufacture an instrument for measuring surface scattering and roughness of supersmooth surfaces. It can be used not only for measuring opaque sample but also for measuring transparent sample.

Citation Download Citation

Yi-Sheng Chen and Wen-Gui Wang "Laser Scatterometer", Proc. SPIE 0967, Stray Light and Contamination in Optical Systems, (5 April 1989); https://doi.org/10.1117/12.948104

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