Numerical method to predict and fabricate aspherical microlens arrays using 248-nm excimer laser ablation

C. T. Pan; S. Shen; Chi-Chang Hsieh; Chi-Hui Chien; Yung-Chang Chen

doi:10.1117/1.1794178

1 October 2004 Numerical method to predict and fabricate aspherical microlens arrays using 248-nm excimer laser ablation

C. T. Pan, S. Shen, Chi-Chang Hsieh, Chi-Hui Chien, Yung-Chang Chen

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 3, Issue 4, (October 2004). https://doi.org/10.1117/1.1794178

Abstract

A method of numerical simulations is used to predict the profile of a 3-D aspherical microlens array. Based on the simulated results, the desired micro-optical lens profile is obtained through excimer laser ablation. The simulation method applied in the excimer laser ablation can significantly reduce the quantity of microablation experiments. The ablated microstructures with surface average roughness of Ra<20 nm are successfully achieved for micro-optical components. The excimer laser ablation parameters include laser fluence, shot number, workstation scanning velocity, and repetition rate. Various profiles of microlens and microprism arrays with different dimensions can utilize numerical simulation and form desired geometries by laser ablation.

©(2004) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

C. T. Pan, S. Shen, Chi-Chang Hsieh, Chi-Hui Chien, and Yung-Chang Chen "Numerical method to predict and fabricate aspherical microlens arrays using 248-nm excimer laser ablation," Journal of Micro/Nanolithography, MEMS, and MOEMS 3(4), (1 October 2004). https://doi.org/10.1117/1.1794178

Published: 1 October 2004

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available