Prof. Akihiro Ikeda
at Sojo Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 4 March 2019 Presentation + Paper
T. Kikuchi, K. Imokawa, A. Ikeda, D. Nakamura, T. Asano, H. Ikenoue
Proceedings Volume 10905, 109050Z (2019) https://doi.org/10.1117/12.2509191
KEYWORDS: Silicon carbide, Doping, Resistance, Electrodes, Crystals, Laser irradiation, Argon, Excimer lasers, Oxidation, Nitrogen

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