Dr. Albert S. Bergendahl Profile

Dr. Albert S. Bergendahl

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Publications (3)

Proceedings Article | 17 May 1994 Paper

Interpreting cost of ownership for mix-and-match lithography

Alan Levine, Albert Bergendahl

Proceedings Volume 2197, (1994) https://doi.org/10.1117/12.175470

KEYWORDS: Reticles, Lithography, Manufacturing, Semiconducting wafers, Chlorine, Systems modeling, Instrument modeling, Custom fabrication, Pollution control, Integrated circuits

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Proceedings Article | 9 July 1992 Paper

Manufacturing implementation of deep-UV lithography for 500-nm devices

Steven Holmes, Albert Bergendahl, Diana Dunn, J. Guidry, Mark Hakey, Karey Holland, Andy Horr, Dean Humphrey, Stephen Knight, D. Macaluso, Katherine Norris, Denis Poley, Paul Rabidoux, John Sturtevant, Dean Writer

Proceedings Volume 1671, (1992) https://doi.org/10.1117/12.136040

KEYWORDS: Deep ultraviolet, Lithography, Manufacturing, Photomasks, Semiconducting wafers, Wafer testing, Photoresist processing, Reticles, Scanning electron microscopy, Photoresist developing

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Proceedings Article | 1 June 1990 Paper

Deep-ultraviolet lithography for 500-nm devices

Steven Holmes, Ruth Levy, Albert Bergendahl, Karey Holland, John Maltabes, Stephen Knight, Katherine Norris, Denis Poley

Proceedings Volume 1264, (1990) https://doi.org/10.1117/12.20180

KEYWORDS: Photomasks, Deep ultraviolet, Lithography, Optical lithography, Semiconducting wafers, Optical alignment, Image processing, Etching, Overlay metrology, Wafer-level optics

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